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- W1043282357 abstract "Microcantilevers are now gaining popularity in biomolecular sensing. Monitoring andmass detection of biological species can be accurately determined using the micro ornano-scale cantilevers. Piezoresistive sensing method is one of the techniques used inbiosensors as changes in mechanical properties can be converted to electrical output.The advantage of this method is that the readout system can be easily integrated on achip. However, the deflection resolution for the piezoresistive readout system is onlyone nanometer compared with one Angstrom by optical detection method. Currently,most of the piezoresistive based microcantilevers were designed using a double layerby embedding the piezoresistive material on the top surface of the microcantilever. Asthe microcantilever deflects, it undergoes a stress change that will apply strain to thepiezoresistor, thereby causing a change in resistance that can be measured byelectronic means. However, double layer design is requires a more complicatedfabrication process since the piezoresistor has to be embedded with themicrocantilever. Therefore, a single layer design was introduced as an alternative tothe double layer piezoresistive microcantilever where both piezoresistor andmicrocantilever were combined into a single layer using p-doped silicon. This, in tum,will simplify the fabrication process. In this work, a comparative study was done toevaluate the performance trade-off between the double and single layer piezoresistivemicrocantilever. The effect of various geometrical dimensions on the displacementand von Mises stress were studied. A series of double and single layer piezoresistivemicrocantilever were designed using CA TIA software. Finite Element Analysis (FEA)through ANSYS 14.0 was performed on the structural model to analyze theperformance of the microcantilever in terms of displacement and von Mises stress.Based on the simulation results, eventhough both double and single piezoresistivemicrocantilever showed similar trend of graph when applied with the same force, thesingle layer outstand the performance of the double layer. It was also found that thewidth and thickness of the single layer have greater effects on the displacement andvon Mises stress than the double layer. However, for the length, double layermicrocantilever have higher displacement but lower von Mises stress than the singlelayer microcantilever." @default.
- W1043282357 created "2016-06-24" @default.
- W1043282357 creator A5064260161 @default.
- W1043282357 date "2013-01-01" @default.
- W1043282357 modified "2023-09-27" @default.
- W1043282357 title "Mechanical characterization of mems piezoresistive microcantilever sensor for biosensing application (design and simulation)" @default.
- W1043282357 hasPublicationYear "2013" @default.
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