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- W105846184 abstract "Optical projection lithography has been the predominant method of micro- and nano-patterning for most semiconductor and nanotechnology applications. This chapter addresses the approaches, systems, and materials that have been used, as optical lithography has enabled patterning from the micrometer scale down to the nanometer scale. The technology involved with the development of optical systems and imaging methods is discussed, including the optics, sources, photomasks, illumination, and techniques for resolution enhancement." @default.
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- W105846184 date "2014-01-01" @default.
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- W105846184 title "Optical projection lithography" @default.
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- W105846184 doi "https://doi.org/10.1533/9780857098757.1" @default.
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