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• W107136178 endingPage "682" @default.
• W107136178 startingPage "661" @default.
• W107136178 abstract "Many of the processes currently used in the semiconductor industry for the fabrication of microdevices involve chemical reactions at a solid/gas interface. The role of gas-phase metal reactions in the heterogeneous processes of chemical vapor deposition and dry etching is examined. Kinetic information available on the dry etching of Al, Cu, W and other metals is reviewed and compared with the more extensively studied etching of Si. Selective and blanket chemical vapor deposition (CVD) techniques of metals such as Cu and W are described." @default.
• W107136178 created "2016-06-24" @default.
• W107136178 creator A5046660765 @default.
• W107136178 date "1992-01-01" @default.
• W107136178 modified "2023-09-27" @default.
• W107136178 title "REACTIONS OF METAL SPECIES IN DRY ETCHING AND CHEMICAL VAPOR DEPOSITION" @default.
• W107136178 cites W1666905484 @default.
• W107136178 cites W1964108843 @default.
• W107136178 cites W1966516022 @default.
• W107136178 cites W1968590512 @default.
• W107136178 cites W1968761733 @default.
• W107136178 cites W1969328134 @default.
• W107136178 cites W1971244602 @default.
• W107136178 cites W1971394797 @default.
• W107136178 cites W1978655201 @default.
• W107136178 cites W1979944209 @default.
• W107136178 cites W1981597248 @default.
• W107136178 cites W1982445769 @default.
• W107136178 cites W1987326789 @default.
• W107136178 cites W1989173086 @default.
• W107136178 cites W1993649064 @default.
• W107136178 cites W2000393857 @default.
• W107136178 cites W2008505011 @default.
• W107136178 cites W2011747856 @default.
• W107136178 cites W2011919858 @default.
• W107136178 cites W2013830549 @default.
• W107136178 cites W2014923463 @default.
• W107136178 cites W2015171139 @default.
• W107136178 cites W2015759321 @default.
• W107136178 cites W2017719366 @default.
• W107136178 cites W2018131909 @default.
• W107136178 cites W2021015832 @default.
• W107136178 cites W2021580733 @default.
• W107136178 cites W2022306153 @default.
• W107136178 cites W2028104330 @default.
• W107136178 cites W2029613451 @default.
• W107136178 cites W2030296245 @default.
• W107136178 cites W2034400558 @default.
• W107136178 cites W2036266711 @default.
• W107136178 cites W2037615680 @default.
• W107136178 cites W2040094099 @default.
• W107136178 cites W2040602937 @default.
• W107136178 cites W2042507221 @default.
• W107136178 cites W2045157858 @default.
• W107136178 cites W2046270424 @default.
• W107136178 cites W2053502434 @default.
• W107136178 cites W2056697155 @default.
• W107136178 cites W2060099176 @default.
• W107136178 cites W2061467945 @default.
• W107136178 cites W2064567165 @default.
• W107136178 cites W2065633090 @default.
• W107136178 cites W2067145816 @default.
• W107136178 cites W2069703623 @default.
• W107136178 cites W2070808414 @default.
• W107136178 cites W2072544063 @default.
• W107136178 cites W2073695542 @default.
• W107136178 cites W2076825470 @default.
• W107136178 cites W2077244276 @default.
• W107136178 cites W2077706231 @default.
• W107136178 cites W2078576744 @default.
• W107136178 cites W2079370025 @default.
• W107136178 cites W2079847997 @default.
• W107136178 cites W2085900121 @default.
• W107136178 cites W2087535049 @default.
• W107136178 cites W2088531173 @default.
• W107136178 cites W2088986201 @default.
• W107136178 cites W2093706053 @default.
• W107136178 cites W2094427838 @default.
• W107136178 cites W2095405396 @default.
• W107136178 cites W2100556678 @default.
• W107136178 cites W2107562997 @default.
• W107136178 cites W2113699851 @default.
• W107136178 cites W2128202136 @default.
• W107136178 cites W2138534821 @default.
• W107136178 cites W2152340352 @default.
• W107136178 cites W2169359586 @default.
• W107136178 cites W2211455709 @default.
• W107136178 cites W2238711702 @default.
• W107136178 cites W2258256454 @default.
• W107136178 cites W2324284257 @default.
• W107136178 cites W2335081086 @default.
• W107136178 cites W2335326221 @default.
• W107136178 doi "https://doi.org/10.1016/b978-0-444-89070-2.50031-1" @default.
• W107136178 hasPublicationYear "1992" @default.
• W107136178 type Work @default.
• W107136178 sameAs 107136178 @default.
• W107136178 citedByCount "0" @default.
• W107136178 crossrefType "book-chapter" @default.
• W107136178 hasAuthorship W107136178A5046660765 @default.
• W107136178 hasConcept C100460472 @default.
• W107136178 hasConcept C127413603 @default.
• W107136178 hasConcept C1291036 @default.
• W107136178 hasConcept C130472188 @default.
• W107136178 hasConcept C136525101 @default.
• W107136178 hasConcept C142724271 @default.
• W107136178 hasConcept C151730666 @default.
• W107136178 hasConcept C159985019 @default.
• W107136178 hasConcept C171250308 @default.

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