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- W108314630 abstract "A microwave electron cyclotron resonance (ECR) plasma source has been operated to produce reactive plasmas of oxygen and its mixture with argon. Aluminum samples (0.95 cm by 1.9 cm) were coated with thin films (<20 {mu}m in thickness) of Shell Vitrea oil and cleaned by using such reactive plasmas. The plasma cleaning was done in discharge conditions of microwave power up to 1300 W, radio frequency power up to 200 W, biased potential up to 400 V, gas pressures up to 5 mtorr, and operating time up to 35 min. The surface texture of the postcleaned samples has been examined visually. Mass loss of the samples after plasma cleaning was measured to estimate cleaning rates. Measured clean rates of low-pressure (0.5-mtorr) argon/oxygen plasmas were as high as 2.7 {mu}m/min. X-ray photoelectron spectroscopy (XPS) was used to determine cleanliness of the sample surfaces after plasma cleaning. The XPS study on polished samples confirmed the effectiveness of plasma cleaning in achieving atomic level of surface cleanliness. In this technical memorandum plasma properties, cleaning phenomena, and significant results are reported and discussed." @default.
- W108314630 created "2016-06-24" @default.
- W108314630 creator A5001118247 @default.
- W108314630 creator A5004157623 @default.
- W108314630 creator A5016004162 @default.
- W108314630 creator A5023571091 @default.
- W108314630 creator A5036572379 @default.
- W108314630 creator A5047294714 @default.
- W108314630 creator A5052854551 @default.
- W108314630 creator A5089901033 @default.
- W108314630 date "1994-03-01" @default.
- W108314630 modified "2023-10-18" @default.
- W108314630 title "Plasma surface cleaning in a microwave plasma source" @default.
- W108314630 cites W1974162041 @default.
- W108314630 cites W1982356505 @default.
- W108314630 cites W2031041994 @default.
- W108314630 cites W2142336910 @default.
- W108314630 cites W2154315494 @default.
- W108314630 cites W2156436431 @default.
- W108314630 doi "https://doi.org/10.2172/10141690" @default.
- W108314630 hasPublicationYear "1994" @default.
- W108314630 type Work @default.
- W108314630 sameAs 108314630 @default.
- W108314630 citedByCount "3" @default.
- W108314630 countsByYear W1083146302021 @default.
- W108314630 crossrefType "report" @default.
- W108314630 hasAuthorship W108314630A5001118247 @default.
- W108314630 hasAuthorship W108314630A5004157623 @default.
- W108314630 hasAuthorship W108314630A5016004162 @default.
- W108314630 hasAuthorship W108314630A5023571091 @default.
- W108314630 hasAuthorship W108314630A5036572379 @default.
- W108314630 hasAuthorship W108314630A5047294714 @default.
- W108314630 hasAuthorship W108314630A5052854551 @default.
- W108314630 hasAuthorship W108314630A5089901033 @default.
- W108314630 hasBestOaLocation W1083146303 @default.
- W108314630 hasConcept C113196181 @default.
- W108314630 hasConcept C121332964 @default.
- W108314630 hasConcept C175361016 @default.
- W108314630 hasConcept C175708663 @default.
- W108314630 hasConcept C178790620 @default.
- W108314630 hasConcept C185592680 @default.
- W108314630 hasConcept C188224857 @default.
- W108314630 hasConcept C192562407 @default.
- W108314630 hasConcept C30646810 @default.
- W108314630 hasConcept C43617362 @default.
- W108314630 hasConcept C44838205 @default.
- W108314630 hasConcept C46141821 @default.
- W108314630 hasConcept C547737533 @default.
- W108314630 hasConcept C60581705 @default.
- W108314630 hasConcept C62520636 @default.
- W108314630 hasConcept C82706917 @default.
- W108314630 hasConcept C97355855 @default.
- W108314630 hasConceptScore W108314630C113196181 @default.
- W108314630 hasConceptScore W108314630C121332964 @default.
- W108314630 hasConceptScore W108314630C175361016 @default.
- W108314630 hasConceptScore W108314630C175708663 @default.
- W108314630 hasConceptScore W108314630C178790620 @default.
- W108314630 hasConceptScore W108314630C185592680 @default.
- W108314630 hasConceptScore W108314630C188224857 @default.
- W108314630 hasConceptScore W108314630C192562407 @default.
- W108314630 hasConceptScore W108314630C30646810 @default.
- W108314630 hasConceptScore W108314630C43617362 @default.
- W108314630 hasConceptScore W108314630C44838205 @default.
- W108314630 hasConceptScore W108314630C46141821 @default.
- W108314630 hasConceptScore W108314630C547737533 @default.
- W108314630 hasConceptScore W108314630C60581705 @default.
- W108314630 hasConceptScore W108314630C62520636 @default.
- W108314630 hasConceptScore W108314630C82706917 @default.
- W108314630 hasConceptScore W108314630C97355855 @default.
- W108314630 hasLocation W1083146301 @default.
- W108314630 hasLocation W1083146302 @default.
- W108314630 hasLocation W1083146303 @default.
- W108314630 hasOpenAccess W108314630 @default.
- W108314630 hasPrimaryLocation W1083146301 @default.
- W108314630 hasRelatedWork W108314630 @default.
- W108314630 hasRelatedWork W1582414763 @default.
- W108314630 hasRelatedWork W1982160538 @default.
- W108314630 hasRelatedWork W1992016006 @default.
- W108314630 hasRelatedWork W2008593163 @default.
- W108314630 hasRelatedWork W2059946336 @default.
- W108314630 hasRelatedWork W2126988879 @default.
- W108314630 hasRelatedWork W2334081945 @default.
- W108314630 hasRelatedWork W2592126725 @default.
- W108314630 hasRelatedWork W3021852093 @default.
- W108314630 isParatext "false" @default.
- W108314630 isRetracted "false" @default.
- W108314630 magId "108314630" @default.
- W108314630 workType "report" @default.