Matches in SemOpenAlex for { <https://semopenalex.org/work/W1126434898> ?p ?o ?g. }
- W1126434898 endingPage "50" @default.
- W1126434898 startingPage "1" @default.
- W1126434898 abstract "Ion erosion has proved to be an increasingly valuable tool to electron microscopists, especially those engaged in examining the classes of materials, such as ceramics, composites, impurity-doped semiconductors, and alloys. These materials are difficult to etch chemically or can contain constituents that etch at widely differing rates. For specimen preparation for electron microscopy, the ion source is used as a machining tool. Where chemical or electrolytic etching is possible, liquid techniques are still favored because the equipment is generally less costly, the etching rate is faster, and there is no radiation damage; although specimens may suffer chemical contamination. Because of the relatively slow ion-etching rates, materials are commonly prethinned by mechanical or chemical means, or a combination. This chapter discusses the production of ion beams, the sputtering process, some ion etching rates and sputtering yield data, ion thinning for transmission electron microscopy, ion erosion equipment characteristics, and ion erosion for scanning electron microscopy." @default.
- W1126434898 created "2016-06-24" @default.
- W1126434898 creator A5005368488 @default.
- W1126434898 date "1978-01-01" @default.
- W1126434898 modified "2023-09-27" @default.
- W1126434898 title "Ion Beam Technology Applied to Electron Microscopy" @default.
- W1126434898 cites W1485458686 @default.
- W1126434898 cites W1579063070 @default.
- W1126434898 cites W1923594412 @default.
- W1126434898 cites W1963598483 @default.
- W1126434898 cites W1964315764 @default.
- W1126434898 cites W1965841701 @default.
- W1126434898 cites W1966466982 @default.
- W1126434898 cites W1968428741 @default.
- W1126434898 cites W1972888659 @default.
- W1126434898 cites W1974792910 @default.
- W1126434898 cites W1975660187 @default.
- W1126434898 cites W1975660837 @default.
- W1126434898 cites W1980684984 @default.
- W1126434898 cites W1981502182 @default.
- W1126434898 cites W1984469756 @default.
- W1126434898 cites W1990348367 @default.
- W1126434898 cites W1992830897 @default.
- W1126434898 cites W1995859295 @default.
- W1126434898 cites W1996177684 @default.
- W1126434898 cites W1998717539 @default.
- W1126434898 cites W2003406360 @default.
- W1126434898 cites W2005292382 @default.
- W1126434898 cites W2007515695 @default.
- W1126434898 cites W2009138980 @default.
- W1126434898 cites W2009610203 @default.
- W1126434898 cites W2011919472 @default.
- W1126434898 cites W2013302159 @default.
- W1126434898 cites W2015091189 @default.
- W1126434898 cites W2021121149 @default.
- W1126434898 cites W2021753111 @default.
- W1126434898 cites W2022186076 @default.
- W1126434898 cites W2029335078 @default.
- W1126434898 cites W2032078512 @default.
- W1126434898 cites W2037444433 @default.
- W1126434898 cites W2039027601 @default.
- W1126434898 cites W2040184453 @default.
- W1126434898 cites W2042724863 @default.
- W1126434898 cites W2044806377 @default.
- W1126434898 cites W2045417065 @default.
- W1126434898 cites W2047847111 @default.
- W1126434898 cites W2049173246 @default.
- W1126434898 cites W2050080211 @default.
- W1126434898 cites W2051530892 @default.
- W1126434898 cites W2052506611 @default.
- W1126434898 cites W2054897438 @default.
- W1126434898 cites W2058799584 @default.
- W1126434898 cites W2071908782 @default.
- W1126434898 cites W2072081612 @default.
- W1126434898 cites W2072867625 @default.
- W1126434898 cites W2074108668 @default.
- W1126434898 cites W2077527215 @default.
- W1126434898 cites W2079321830 @default.
- W1126434898 cites W2079744804 @default.
- W1126434898 cites W2084560565 @default.
- W1126434898 cites W2084961325 @default.
- W1126434898 cites W2091506857 @default.
- W1126434898 cites W2092407120 @default.
- W1126434898 cites W2118607114 @default.
- W1126434898 cites W2119217740 @default.
- W1126434898 cites W2150965567 @default.
- W1126434898 cites W2327812943 @default.
- W1126434898 cites W2592252775 @default.
- W1126434898 cites W2918301485 @default.
- W1126434898 cites W3046333974 @default.
- W1126434898 doi "https://doi.org/10.1016/s0065-2539(08)60084-0" @default.
- W1126434898 hasPublicationYear "1978" @default.
- W1126434898 type Work @default.
- W1126434898 sameAs 1126434898 @default.
- W1126434898 citedByCount "15" @default.
- W1126434898 crossrefType "book-chapter" @default.
- W1126434898 hasAuthorship W1126434898A5005368488 @default.
- W1126434898 hasConcept C100460472 @default.
- W1126434898 hasConcept C109486029 @default.
- W1126434898 hasConcept C113196181 @default.
- W1126434898 hasConcept C145148216 @default.
- W1126434898 hasConcept C146088050 @default.
- W1126434898 hasConcept C159985019 @default.
- W1126434898 hasConcept C161866238 @default.
- W1126434898 hasConcept C171250308 @default.
- W1126434898 hasConcept C178790620 @default.
- W1126434898 hasConcept C185592680 @default.
- W1126434898 hasConcept C19067145 @default.
- W1126434898 hasConcept C192562407 @default.
- W1126434898 hasConcept C193016168 @default.
- W1126434898 hasConcept C22423302 @default.
- W1126434898 hasConcept C26771246 @default.
- W1126434898 hasConcept C2779227376 @default.
- W1126434898 hasConcept C33220542 @default.
- W1126434898 hasConcept C43617362 @default.
- W1126434898 hasConcept C48736558 @default.
- W1126434898 hasConcept C50774322 @default.
- W1126434898 hasConceptScore W1126434898C100460472 @default.