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- W113270880 abstract "A method for manufacturing a new type of CMP pad is presented. The goal is to create a mold containing micro sized features that can be used in vacuum casting to produce the polymeric polishing pads. To achieve this, a positive mold is cut from PMMA using micro milling techniques. An opposite mold is then created by electroplating nickel onto the mold and separating the metal from the polymer." @default.
- W113270880 created "2016-06-24" @default.
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- W113270880 date "2003-06-01" @default.
- W113270880 modified "2023-09-26" @default.
- W113270880 title "Micromilling for Mold Fabrication" @default.
- W113270880 hasPublicationYear "2003" @default.
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