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- W1133717023 abstract "Abstract Transition metal doping of aluminium nitride (AlN) type thin films was recently employed to increase the piezoelectric constants for application in micro electromechanical systems. Y x Al 1− x N thin films were synthesized with varying x up to 11.6% by reactive co-sputtering from elemental Al and Y targets. Ab initio density functional theory studies up to x = 50% yttrium in Y x Al 1− x N suggest increasing piezoelectric constants d 33 and d 31 with increasing yttrium content. Experimental measurements of d 33 yield increasing values for increasing yttrium content though, remaining below the prediction from ab initio calculations. Detailed X-ray diffraction and transmission electron microscopy studies prove that, although the thin films are highly c -axis oriented, their nucleation at the Si (1 0 0) substrates leads to the formation of an amorphous interface region with increasing Y." @default.
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- W1133717023 date "2015-11-01" @default.
- W1133717023 modified "2023-10-17" @default.
- W1133717023 title "Microstructure and piezoelectric response of Y Al1−N thin films" @default.
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- W1133717023 doi "https://doi.org/10.1016/j.actamat.2015.08.019" @default.
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