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- W1170433455 abstract "A method is presented in this paper for resolution calibration of the laser feedback displacement sensor based on Fabry-Perot (F-P) high-order feedback cavity using a conventional feedback system to measure the same displacement with it simultaneously. By calibrating the ratio of the intensity modulated curves gotten by this two different systems, the accurate optical resolution of the integrated system can be obtained. Without using any other subdivision method, the optical resolution can be about 11nm, which is traceable to light wavelength. By adding 20 times electric subdivision, the final resolution of this system is about 0.55nm. The integrated system can fit the requirement of the industrial application, and can also be used for nanometrology." @default.
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- W1170433455 date "2015-07-17" @default.
- W1170433455 modified "2023-09-23" @default.
- W1170433455 title "Method for traceable resolution calibration of the laser feedback displacement sensor" @default.
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- W1170433455 doi "https://doi.org/10.1117/12.2186135" @default.
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