Matches in SemOpenAlex for { <https://semopenalex.org/work/W117477600> ?p ?o ?g. }
Showing items 1 to 82 of
82
with 100 items per page.
- W117477600 abstract "A relationship between hydrogen and the equilibrium positive charge in silicon nitride films has been confirmed by rehydrogenation of annealed films using a hydrogen plasma. The primary relation between hydrogen and silicon-nitride charge is associated with Si-H formation." @default.
- W117477600 created "2016-06-24" @default.
- W117477600 creator A5019505131 @default.
- W117477600 creator A5039159234 @default.
- W117477600 creator A5054115247 @default.
- W117477600 date "1980-01-01" @default.
- W117477600 modified "2023-10-16" @default.
- W117477600 title "HYDROGENATION OF AMORPHOUS SILICON NITRIDE" @default.
- W117477600 cites W1987174480 @default.
- W117477600 cites W2005824840 @default.
- W117477600 cites W2022805479 @default.
- W117477600 cites W2059862119 @default.
- W117477600 cites W2068182191 @default.
- W117477600 cites W2082438620 @default.
- W117477600 doi "https://doi.org/10.1016/b978-0-08-025969-7.50032-4" @default.
- W117477600 hasPublicationYear "1980" @default.
- W117477600 type Work @default.
- W117477600 sameAs 117477600 @default.
- W117477600 citedByCount "0" @default.
- W117477600 crossrefType "book-chapter" @default.
- W117477600 hasAuthorship W117477600A5019505131 @default.
- W117477600 hasAuthorship W117477600A5039159234 @default.
- W117477600 hasAuthorship W117477600A5054115247 @default.
- W117477600 hasConcept C127413603 @default.
- W117477600 hasConcept C171250308 @default.
- W117477600 hasConcept C178790620 @default.
- W117477600 hasConcept C185592680 @default.
- W117477600 hasConcept C191897082 @default.
- W117477600 hasConcept C192562407 @default.
- W117477600 hasConcept C194760766 @default.
- W117477600 hasConcept C2776390347 @default.
- W117477600 hasConcept C2777431650 @default.
- W117477600 hasConcept C2779227376 @default.
- W117477600 hasConcept C2779667780 @default.
- W117477600 hasConcept C42360764 @default.
- W117477600 hasConcept C512968161 @default.
- W117477600 hasConcept C544956773 @default.
- W117477600 hasConcept C56052488 @default.
- W117477600 hasConcept C8010536 @default.
- W117477600 hasConceptScore W117477600C127413603 @default.
- W117477600 hasConceptScore W117477600C171250308 @default.
- W117477600 hasConceptScore W117477600C178790620 @default.
- W117477600 hasConceptScore W117477600C185592680 @default.
- W117477600 hasConceptScore W117477600C191897082 @default.
- W117477600 hasConceptScore W117477600C192562407 @default.
- W117477600 hasConceptScore W117477600C194760766 @default.
- W117477600 hasConceptScore W117477600C2776390347 @default.
- W117477600 hasConceptScore W117477600C2777431650 @default.
- W117477600 hasConceptScore W117477600C2779227376 @default.
- W117477600 hasConceptScore W117477600C2779667780 @default.
- W117477600 hasConceptScore W117477600C42360764 @default.
- W117477600 hasConceptScore W117477600C512968161 @default.
- W117477600 hasConceptScore W117477600C544956773 @default.
- W117477600 hasConceptScore W117477600C56052488 @default.
- W117477600 hasConceptScore W117477600C8010536 @default.
- W117477600 hasLocation W1174776001 @default.
- W117477600 hasOpenAccess W117477600 @default.
- W117477600 hasPrimaryLocation W1174776001 @default.
- W117477600 hasRelatedWork W1006352040 @default.
- W117477600 hasRelatedWork W1602497442 @default.
- W117477600 hasRelatedWork W1975508732 @default.
- W117477600 hasRelatedWork W1977124961 @default.
- W117477600 hasRelatedWork W1983363491 @default.
- W117477600 hasRelatedWork W1984200913 @default.
- W117477600 hasRelatedWork W2022876535 @default.
- W117477600 hasRelatedWork W2029328213 @default.
- W117477600 hasRelatedWork W2030259704 @default.
- W117477600 hasRelatedWork W2031431461 @default.
- W117477600 hasRelatedWork W2069685909 @default.
- W117477600 hasRelatedWork W2081435256 @default.
- W117477600 hasRelatedWork W2085433149 @default.
- W117477600 hasRelatedWork W2088967355 @default.
- W117477600 hasRelatedWork W2094772591 @default.
- W117477600 hasRelatedWork W2119503553 @default.
- W117477600 hasRelatedWork W2124455394 @default.
- W117477600 hasRelatedWork W2361831592 @default.
- W117477600 hasRelatedWork W24645248 @default.
- W117477600 hasRelatedWork W2514887566 @default.
- W117477600 isParatext "false" @default.
- W117477600 isRetracted "false" @default.
- W117477600 magId "117477600" @default.
- W117477600 workType "book-chapter" @default.