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- W120539458 abstract "Amorphous hydrogenated silicon carbide (a-SiCx:H) films were deposited onto Si substrates by using the decomposition reaction of tetramethylsilane with the microwave discharged products of Ar. The contamination of H2O molecules was avoided by passing the starting materials through a desiccant (P2O5). A negative bias voltage (�VRF = 0-100 V) was applied to the substrate by using an external radio-frequency source to induce Ar-ion bombardment of the film surface. The pressure of Ar was 0.1 Torr. Film thickness was 1-5 �m under the deposition" @default.
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- W120539458 date "2009-01-01" @default.
- W120539458 modified "2023-09-27" @default.
- W120539458 title "Mechanically Hard SiC x :H Films in Amorphous Phase" @default.
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- W120539458 hasPublicationYear "2009" @default.
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