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- W122383368 abstract "With the expanding use of excimer lasers for research and manufacturing, the design and availability of high quality beam delivery systems is of increasing importance, as is our understanding of physics of excimer laser-matter interactions. This book focuses on recent developments in materials useful in the design of optical systems for excimer beam delivery, as well as on the mechanisms of laser materials processing applications." @default.
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- W122383368 date "1989-01-01" @default.
- W122383368 modified "2023-09-27" @default.
- W122383368 title "Excimer Beam Applications" @default.
- W122383368 hasPublicationYear "1989" @default.
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