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- W125342811 abstract "The procedure used to fabricate photomasks for a Gallium Arsenide test chip with edge dimensions of 2.54 by 2.54 mm (100 by 100 mils) containing linewidths as small as 0.8 microns (31.5 ..mu.. in.) using equipment belonging to the Technical Photography Group, Rm. 1258, Bldg. 121 is described. Gallium Arsenide Metal Schottky Field Effect Transistors (GaAs MESFET's) require photomasks with micron and submicron linewidths. In addition, the research and development status of this particular project makes it necessary to try out several design iterations in order to accumulate experimental data and verify theories. Each new design iteration requires a new set of photomasks. Commercial mask vendors are reluctant to work on linewidths below two microns at this time, although they will do so at a premium price ($4 K per set). Even if a commercial vendor agrees to make photomasks with one micron lines, the long delivery times encountered (several months) can seriously hurt the momentum of R and D projects." @default.
- W125342811 created "2016-06-24" @default.
- W125342811 creator A5015663067 @default.
- W125342811 creator A5066051245 @default.
- W125342811 date "1979-12-18" @default.
- W125342811 modified "2023-09-27" @default.
- W125342811 title "Hard surface photomasks with micron and submicron linewidths" @default.
- W125342811 hasPublicationYear "1979" @default.
- W125342811 type Work @default.
- W125342811 sameAs 125342811 @default.
- W125342811 citedByCount "0" @default.
- W125342811 crossrefType "journal-article" @default.
- W125342811 hasAuthorship W125342811A5015663067 @default.
- W125342811 hasAuthorship W125342811A5066051245 @default.
- W125342811 hasConcept C119599485 @default.
- W125342811 hasConcept C120665830 @default.
- W125342811 hasConcept C121332964 @default.
- W125342811 hasConcept C127413603 @default.
- W125342811 hasConcept C134123091 @default.
- W125342811 hasConcept C145598152 @default.
- W125342811 hasConcept C14737013 @default.
- W125342811 hasConcept C165801399 @default.
- W125342811 hasConcept C171250308 @default.
- W125342811 hasConcept C172385210 @default.
- W125342811 hasConcept C192562407 @default.
- W125342811 hasConcept C2779227376 @default.
- W125342811 hasConcept C49040817 @default.
- W125342811 hasConcept C510052550 @default.
- W125342811 hasConcept C53524968 @default.
- W125342811 hasConceptScore W125342811C119599485 @default.
- W125342811 hasConceptScore W125342811C120665830 @default.
- W125342811 hasConceptScore W125342811C121332964 @default.
- W125342811 hasConceptScore W125342811C127413603 @default.
- W125342811 hasConceptScore W125342811C134123091 @default.
- W125342811 hasConceptScore W125342811C145598152 @default.
- W125342811 hasConceptScore W125342811C14737013 @default.
- W125342811 hasConceptScore W125342811C165801399 @default.
- W125342811 hasConceptScore W125342811C171250308 @default.
- W125342811 hasConceptScore W125342811C172385210 @default.
- W125342811 hasConceptScore W125342811C192562407 @default.
- W125342811 hasConceptScore W125342811C2779227376 @default.
- W125342811 hasConceptScore W125342811C49040817 @default.
- W125342811 hasConceptScore W125342811C510052550 @default.
- W125342811 hasConceptScore W125342811C53524968 @default.
- W125342811 hasLocation W1253428111 @default.
- W125342811 hasOpenAccess W125342811 @default.
- W125342811 hasPrimaryLocation W1253428111 @default.
- W125342811 hasRelatedWork W1507344427 @default.
- W125342811 hasRelatedWork W166314585 @default.
- W125342811 hasRelatedWork W2001001617 @default.
- W125342811 hasRelatedWork W2015174809 @default.
- W125342811 hasRelatedWork W2048841071 @default.
- W125342811 hasRelatedWork W2076591196 @default.
- W125342811 hasRelatedWork W2087643207 @default.
- W125342811 hasRelatedWork W2142711179 @default.
- W125342811 hasRelatedWork W2157146607 @default.
- W125342811 hasRelatedWork W2314370298 @default.
- W125342811 hasRelatedWork W2536227435 @default.
- W125342811 hasRelatedWork W2736475602 @default.
- W125342811 hasRelatedWork W3086755518 @default.
- W125342811 hasRelatedWork W1966853930 @default.
- W125342811 hasRelatedWork W2082923448 @default.
- W125342811 hasRelatedWork W73405863 @default.
- W125342811 isParatext "false" @default.
- W125342811 isRetracted "false" @default.
- W125342811 magId "125342811" @default.
- W125342811 workType "article" @default.