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- W126879563 abstract "PHEMT device parametric performance was improved by transfer from a transformer coupled plasma source to an RF helicon wave high density plasma source for the oxide dielectric etch prior to ohmic metal deposition. Process stability and uniformity were enhanced leading a higher yielding product with a wider process window. Significant improvement was measured for device parameters such as contact resistance, on resistance, and transconductance. Evaluation of etch source differences were investigated by examining surface damage." @default.
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- W126879563 date "2009-01-01" @default.
- W126879563 modified "2023-09-24" @default.
- W126879563 title "Influence of Dielectric Plasma Etch Source for PHEMT Device Performance" @default.
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- W126879563 hasPublicationYear "2009" @default.
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