Matches in SemOpenAlex for { <https://semopenalex.org/work/W128922904> ?p ?o ?g. }
- W128922904 endingPage "8096" @default.
- W128922904 startingPage "8084" @default.
- W128922904 abstract "In this letter, we investigate the impact of potassium hydroxide (KOH) etching procedure on Silicon nanostructure fabricated by Atomic force microscopy on P-type Silicon-on-insulator. An electrochemical process, as the local anodic oxidation followed by two wet chemical etching steps, KOH etching for silicon removal and hydrofluoric etching for oxide removal, were implemented to fabricate the silicon nanostructures. The effect of the pure KOH concentrations (10% to 30% wt) on the quality of the surface is studied. The influence of etching immersing time in etching of nanostructure and SOI surface are considered as well. Impact of different KOH concentrations mixed with 10% IPA with reaction temperature on etch rate is investigated. The KOH etching process is elaborately optimized by 30%wt. KOH + 10%vol. IPA in appropriate time and temperature. The angle of the walls in etch pit for extracted nanowire reveals some deviation from the standard anisotropic etching." @default.
- W128922904 created "2016-06-24" @default.
- W128922904 creator A5000439585 @default.
- W128922904 creator A5009548851 @default.
- W128922904 creator A5011322059 @default.
- W128922904 creator A5017400979 @default.
- W128922904 creator A5034089848 @default.
- W128922904 creator A5048754871 @default.
- W128922904 creator A5058006019 @default.
- W128922904 creator A5069202856 @default.
- W128922904 creator A5073457690 @default.
- W128922904 creator A5087109816 @default.
- W128922904 creator A5089994687 @default.
- W128922904 date "2013-06-01" @default.
- W128922904 modified "2023-10-18" @default.
- W128922904 title "Impact of KOH Etching on Nanostructure Fabricated by Local Anodic Oxidation Method" @default.
- W128922904 cites W1670172520 @default.
- W128922904 cites W1963849772 @default.
- W128922904 cites W1965869559 @default.
- W128922904 cites W1975432346 @default.
- W128922904 cites W1994768752 @default.
- W128922904 cites W1999629320 @default.
- W128922904 cites W2001404988 @default.
- W128922904 cites W2006847581 @default.
- W128922904 cites W2007738312 @default.
- W128922904 cites W2013598144 @default.
- W128922904 cites W2024821318 @default.
- W128922904 cites W2026920326 @default.
- W128922904 cites W2029778279 @default.
- W128922904 cites W2042961541 @default.
- W128922904 cites W2054348476 @default.
- W128922904 cites W2054976592 @default.
- W128922904 cites W2058323408 @default.
- W128922904 cites W2062116385 @default.
- W128922904 cites W2062182733 @default.
- W128922904 cites W2063270135 @default.
- W128922904 cites W2082577228 @default.
- W128922904 cites W2090537646 @default.
- W128922904 cites W2096285738 @default.
- W128922904 cites W2110596014 @default.
- W128922904 cites W2125116839 @default.
- W128922904 cites W2143287675 @default.
- W128922904 cites W2145320474 @default.
- W128922904 cites W2154332121 @default.
- W128922904 cites W2157321441 @default.
- W128922904 cites W2371419116 @default.
- W128922904 doi "https://doi.org/10.1016/s1452-3981(23)12871-9" @default.
- W128922904 hasPublicationYear "2013" @default.
- W128922904 type Work @default.
- W128922904 sameAs 128922904 @default.
- W128922904 citedByCount "14" @default.
- W128922904 countsByYear W1289229042012 @default.
- W128922904 countsByYear W1289229042013 @default.
- W128922904 countsByYear W1289229042014 @default.
- W128922904 countsByYear W1289229042016 @default.
- W128922904 countsByYear W1289229042017 @default.
- W128922904 countsByYear W1289229042018 @default.
- W128922904 countsByYear W1289229042019 @default.
- W128922904 countsByYear W1289229042023 @default.
- W128922904 crossrefType "journal-article" @default.
- W128922904 hasAuthorship W128922904A5000439585 @default.
- W128922904 hasAuthorship W128922904A5009548851 @default.
- W128922904 hasAuthorship W128922904A5011322059 @default.
- W128922904 hasAuthorship W128922904A5017400979 @default.
- W128922904 hasAuthorship W128922904A5034089848 @default.
- W128922904 hasAuthorship W128922904A5048754871 @default.
- W128922904 hasAuthorship W128922904A5058006019 @default.
- W128922904 hasAuthorship W128922904A5069202856 @default.
- W128922904 hasAuthorship W128922904A5073457690 @default.
- W128922904 hasAuthorship W128922904A5087109816 @default.
- W128922904 hasAuthorship W128922904A5089994687 @default.
- W128922904 hasBestOaLocation W1289229041 @default.
- W128922904 hasConcept C100460472 @default.
- W128922904 hasConcept C121285527 @default.
- W128922904 hasConcept C127413603 @default.
- W128922904 hasConcept C1291036 @default.
- W128922904 hasConcept C130472188 @default.
- W128922904 hasConcept C171250308 @default.
- W128922904 hasConcept C186187911 @default.
- W128922904 hasConcept C191897082 @default.
- W128922904 hasConcept C192562407 @default.
- W128922904 hasConcept C2776967294 @default.
- W128922904 hasConcept C2779227376 @default.
- W128922904 hasConcept C2779439175 @default.
- W128922904 hasConcept C33220542 @default.
- W128922904 hasConcept C42360764 @default.
- W128922904 hasConcept C544956773 @default.
- W128922904 hasConceptScore W128922904C100460472 @default.
- W128922904 hasConceptScore W128922904C121285527 @default.
- W128922904 hasConceptScore W128922904C127413603 @default.
- W128922904 hasConceptScore W128922904C1291036 @default.
- W128922904 hasConceptScore W128922904C130472188 @default.
- W128922904 hasConceptScore W128922904C171250308 @default.
- W128922904 hasConceptScore W128922904C186187911 @default.
- W128922904 hasConceptScore W128922904C191897082 @default.
- W128922904 hasConceptScore W128922904C192562407 @default.
- W128922904 hasConceptScore W128922904C2776967294 @default.
- W128922904 hasConceptScore W128922904C2779227376 @default.