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- W129796362 abstract "An accurate gas-phase analysis over a wide range of temperatures, necessary to understand the complicated gas-phase reaction mechanisms of SiC and Si{sub 3}N{sub 4}/Si{sub 2}N{sub 2}O formations, is discussed. In the experimental arrangement, oxygen partial pressure was continuously measured during both the carbide and the nitride syntheses with a ZrO{sub 2} solid electrolyte. The oxygen partial pressure steadily increased with increasing temperature and reached the maximum level of 10 to the 11th to 10 to the 12th atm in the early stage of the reaction at 1623 K, then decreased again toward the end of reaction. The patterns in the changing pO2 were similar in both SiC and Si{sub 3}N{sub 4} formations. Both high oxygen partial pressure and high SiO partial pressure were generated by the accelerated carbothermal reduction of SiO{sub 2} by forming a molten fluorosilicate with an auxiliary bath. However, the effect of gas composition is different in the SiC and Si{sub 3}N{sub 4} formations; the pCO and pCO{sub 2} forms an oxynitride phase in the Si{sub 3}N{sub 4} formation. 25 refs." @default.
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- W129796362 date "1990-10-01" @default.
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- W129796362 title "Effect of gas phase composition of SiC and Si sub 3 N sub 4 formations" @default.
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