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• W131468119 abstract "A combination of high current and high energy ion beams satisfies the requirements of new applications in ion implantation experiments. High energies in the MeV – range are already used; for large area applications and high dose implantations also mA – current capabilities are needed to keep irradiation times in realistic and economical limits. The status of a high current, high energy acceleration system is discussed, which consists of a bucket ion source, an electrostatic injection system, a Radio Frequency Quadrupole (RFQ) accelerator, and a Spiral Loaded Cavity (SLC)." @default.
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• W131468119 date "1993-01-01" @default.
• W131468119 modified "2023-09-25" @default.
• W131468119 title "An Implantation System for MeV-mA Ion-Beams" @default.
• W131468119 cites W1980120709 @default.
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• W131468119 doi "https://doi.org/10.1016/b978-0-444-89994-1.50083-1" @default.
• W131468119 hasPublicationYear "1993" @default.
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