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• W133091163 abstract "Excimer laser mask projection techniques have been developed and used to manufacture directly miniature thin film devices for the electro-manipulation and separation of bio-particles using travelling-wave dielectrophoresis effects. Multi-level devices with 10μm-wide electrode structures have been fabricated by using excimer laser ablation techniques in both static and mask scanning modes of operation. A prototype device produced in this manner has been used to identify viable and non-viable oocysts." @default.
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• W133091163 date "1999-06-30" @default.
• W133091163 modified "2023-09-27" @default.
• W133091163 title "Direct Manufacture of Miniature Bio-Particle Electro-Manipulator Devices using Excimer Laser Mask Projection Techniques" @default.
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