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- W1332446 abstract "Radiofrequency discharge processing permits etching and deposition in the presence of thermally sensitive materials and directional patterning, which are essential for the fabrication of fine line microelectronics. Mixtures of halogens, halocarbons, inorganic halogen compounds and noble gases have been the most common components of feed gases for etching silicon and III-V compounds, while oxygen-containing feeds are used to “strip” or pattern organic materials. Plasma etching mechanisms can be characterized as physical sputtering, chemical etching, ion “damage” induced etching, and inhibitor ion assisted etching. The governing interactions are determined equally by the gaseous feed mixture and discharge and thermochemical variables. Relationships connecting etching characteristics to physical and chemical variables are reviewed." @default.
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- W1332446 date "1987-01-01" @default.
- W1332446 modified "2023-10-16" @default.
- W1332446 title "Gaseous Media for Plasma Chemistry and Etching" @default.
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- W1332446 doi "https://doi.org/10.1016/b978-0-08-034693-9.50044-7" @default.
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