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- W140826849 abstract "In this work simulations of 1-dimensional diffusion profiles for the emitter formation from a POCl3 gas with Sentaurus Process (Synopsis®) are investigated. We implemented phosphorus in-diffusion via growing phosphorus silicate glass (PSG) in the software and adjusted the parameters for this PV relevant process. In addition a model for phosphorus diffusion gettering (PDG) of iron was implemented. For the precipitation of metals two different models were used, one with a mean radius for all precipitates following Ham's law and another one using the Fokker-Planck- Equation (FPE). To fit parameters and to verify the simulations, the results are compared with phosphorus depth profiles, which were measured after in-diffusion from POCl3 gas at temperatures between 785 and 900°C. We also show some examples for gettering of iron during phosphorus diffusion." @default.
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- W140826849 date "2008-11-01" @default.
- W140826849 modified "2023-09-23" @default.
- W140826849 title "SIMULATION OF PHOSPHORUS DIFFUSION AND IRON GETTERING WITH SENTAURUS PROCESS" @default.
- W140826849 doi "https://doi.org/10.4229/23rdeupvsec2008-2dv.1.4" @default.
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