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- W142123089 abstract "Conventional machining methods have been developed to meet the standards of ultra precision machining. Special milling processes utilizing monocrystalline diamond tools, the so-called fly-cutting processes, are used successfully to manufacture highly precise microstructures with an optical surface finish. In micro assembly often positioning accuracies of only a few micro meters are needed. An approach of the Fraunhofer IPT is to achieve these accuracies using passive alignment strategies. In this paper, the ultra precision machining of the v-groove structures as well as their passive alignment capacities for micro assembly tasks are presented.Key wordsultra precision machiningpassive alignmentassemblymicro components" @default.
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- W142123089 date "2006-08-16" @default.
- W142123089 modified "2023-10-16" @default.
- W142123089 title "Development of Passive Alignment Techniques for the Assembly of Hybrid Microsystems" @default.
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- W142123089 doi "https://doi.org/10.1007/0-387-31277-3_18" @default.
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