Matches in SemOpenAlex for { <https://semopenalex.org/work/W142733497> ?p ?o ?g. }
Showing items 1 to 99 of
99
with 100 items per page.
- W142733497 abstract "Hydrogenation is a key technique to improve the electrical performances of the polysilicon thin film transistors (TFT). However, the modifications of the electrical properties strongly depend on the techniques of hydrogenation. Usually, hydrogen passivation of polysilicon films is performed using RF plasma of hydrogen (1) or by the use of silicon nitride films deposited by plasma enhanced chemical vapor deposition (PECVD) on the polysilicon TFT (2). However, a new technique of hydrogenation based on the electron-cyclotron resonance plasma (ECR) is under investigation in several laboratories (3). In this paper, early electrical results on the hydrogenation of polysilicon TFTs using a new microwave plasma technique which does not use a magnetic field as the ECR technique is presented and compared with those obtained with the silicon nitride passivation technique." @default.
- W142733497 created "2016-06-24" @default.
- W142733497 creator A5061322674 @default.
- W142733497 creator A5067259931 @default.
- W142733497 creator A5067547601 @default.
- W142733497 creator A5076171851 @default.
- W142733497 creator A5091814740 @default.
- W142733497 date "1993-03-23" @default.
- W142733497 modified "2023-09-23" @default.
- W142733497 title "Comparison of the hydrogenation techniques on polysilicon TFTs" @default.
- W142733497 hasPublicationYear "1993" @default.
- W142733497 type Work @default.
- W142733497 sameAs 142733497 @default.
- W142733497 citedByCount "0" @default.
- W142733497 crossrefType "journal-article" @default.
- W142733497 hasAuthorship W142733497A5061322674 @default.
- W142733497 hasAuthorship W142733497A5067259931 @default.
- W142733497 hasAuthorship W142733497A5067547601 @default.
- W142733497 hasAuthorship W142733497A5076171851 @default.
- W142733497 hasAuthorship W142733497A5091814740 @default.
- W142733497 hasConcept C119599485 @default.
- W142733497 hasConcept C121332964 @default.
- W142733497 hasConcept C127413603 @default.
- W142733497 hasConcept C165801399 @default.
- W142733497 hasConcept C171250308 @default.
- W142733497 hasConcept C172385210 @default.
- W142733497 hasConcept C175361016 @default.
- W142733497 hasConcept C178790620 @default.
- W142733497 hasConcept C185592680 @default.
- W142733497 hasConcept C192562407 @default.
- W142733497 hasConcept C2361726 @default.
- W142733497 hasConcept C25356406 @default.
- W142733497 hasConcept C2777431650 @default.
- W142733497 hasConcept C2779227376 @default.
- W142733497 hasConcept C33574316 @default.
- W142733497 hasConcept C38347018 @default.
- W142733497 hasConcept C41008148 @default.
- W142733497 hasConcept C44838205 @default.
- W142733497 hasConcept C49040817 @default.
- W142733497 hasConcept C512968161 @default.
- W142733497 hasConcept C544956773 @default.
- W142733497 hasConcept C57410435 @default.
- W142733497 hasConcept C62520636 @default.
- W142733497 hasConcept C76155785 @default.
- W142733497 hasConcept C82706917 @default.
- W142733497 hasConcept C87359718 @default.
- W142733497 hasConceptScore W142733497C119599485 @default.
- W142733497 hasConceptScore W142733497C121332964 @default.
- W142733497 hasConceptScore W142733497C127413603 @default.
- W142733497 hasConceptScore W142733497C165801399 @default.
- W142733497 hasConceptScore W142733497C171250308 @default.
- W142733497 hasConceptScore W142733497C172385210 @default.
- W142733497 hasConceptScore W142733497C175361016 @default.
- W142733497 hasConceptScore W142733497C178790620 @default.
- W142733497 hasConceptScore W142733497C185592680 @default.
- W142733497 hasConceptScore W142733497C192562407 @default.
- W142733497 hasConceptScore W142733497C2361726 @default.
- W142733497 hasConceptScore W142733497C25356406 @default.
- W142733497 hasConceptScore W142733497C2777431650 @default.
- W142733497 hasConceptScore W142733497C2779227376 @default.
- W142733497 hasConceptScore W142733497C33574316 @default.
- W142733497 hasConceptScore W142733497C38347018 @default.
- W142733497 hasConceptScore W142733497C41008148 @default.
- W142733497 hasConceptScore W142733497C44838205 @default.
- W142733497 hasConceptScore W142733497C49040817 @default.
- W142733497 hasConceptScore W142733497C512968161 @default.
- W142733497 hasConceptScore W142733497C544956773 @default.
- W142733497 hasConceptScore W142733497C57410435 @default.
- W142733497 hasConceptScore W142733497C62520636 @default.
- W142733497 hasConceptScore W142733497C76155785 @default.
- W142733497 hasConceptScore W142733497C82706917 @default.
- W142733497 hasConceptScore W142733497C87359718 @default.
- W142733497 hasLocation W1427334971 @default.
- W142733497 hasOpenAccess W142733497 @default.
- W142733497 hasPrimaryLocation W1427334971 @default.
- W142733497 hasRelatedWork W1578166887 @default.
- W142733497 hasRelatedWork W1972203689 @default.
- W142733497 hasRelatedWork W1983114676 @default.
- W142733497 hasRelatedWork W2047557563 @default.
- W142733497 hasRelatedWork W2084915491 @default.
- W142733497 hasRelatedWork W2089376018 @default.
- W142733497 hasRelatedWork W2099031318 @default.
- W142733497 hasRelatedWork W2122865063 @default.
- W142733497 hasRelatedWork W2125101628 @default.
- W142733497 hasRelatedWork W2135187812 @default.
- W142733497 hasRelatedWork W2140828770 @default.
- W142733497 hasRelatedWork W2161079784 @default.
- W142733497 hasRelatedWork W2197960642 @default.
- W142733497 hasRelatedWork W2315203660 @default.
- W142733497 hasRelatedWork W2540528964 @default.
- W142733497 hasRelatedWork W2542769061 @default.
- W142733497 hasRelatedWork W2611915933 @default.
- W142733497 hasRelatedWork W2937616569 @default.
- W142733497 hasRelatedWork W3146649211 @default.
- W142733497 hasRelatedWork W3200716603 @default.
- W142733497 isParatext "false" @default.
- W142733497 isRetracted "false" @default.
- W142733497 magId "142733497" @default.
- W142733497 workType "article" @default.