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- W1427867535 abstract "通过制备栅内不同掺杂条件的Ni全硅化金属栅电容并分析其C-V和Vfb-EOT特性发现,Ga和Yb较常规的杂质而言具有更好的栅功函数调节能力,能够分别将Ni全硅化金属栅电极功函数调节到价带顶和导带底附近,满足高性能体硅平面互补金属氧化物半导体(CMOS)器件对栅电极功函数的要求. 同时根据电偶极子(Dipole)理论分析了Ga和Yb具有较强栅功函数调节能力的原因. 另外,研究发现栅内掺入Ga或Yb杂质后的Ni全硅化金属栅电容的电容值变大、栅极泄漏电流反而变小,通过对C-V和栅极泄漏电流特性进行分析,对这一现象进行了解释." @default.
- W1427867535 created "2016-06-24" @default.
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- W1427867535 date "2011-01-01" @default.
- W1427867535 modified "2023-09-25" @default.
- W1427867535 title "Ni-FUSI metal gate work function modulation technology" @default.
- W1427867535 doi "https://doi.org/10.7498/aps.60.108102" @default.
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