Matches in SemOpenAlex for { <https://semopenalex.org/work/W142971406> ?p ?o ?g. }
Showing items 1 to 100 of
100
with 100 items per page.
- W142971406 endingPage "246" @default.
- W142971406 startingPage "246" @default.
- W142971406 abstract "In this work the authors investigate La2O3 and ZrO2/La2O3 high-k gate dielectrics on p-type Ge metal-insulator-semiconductor capacitors. La2O3 on Ge exhibits good electrical properties in terms of interface states density, but it may not be scalable yielding high equivalent oxide thickness (EOT) after annealing. By depositing a thin (2 nm) La2O3 passivating layer followed by a ZrO2 cap, a gate stack is obtained which is a very good insulator with improved EOT, retaining at the same time the good passivating properties of La2O3. This indicates that the ZrO2/La2O3 combination could be scalable gate stack to be considered as a candidate for Ge metal-oxide-semiconductor devices." @default.
- W142971406 created "2016-06-24" @default.
- W142971406 creator A5003989108 @default.
- W142971406 creator A5018899317 @default.
- W142971406 creator A5022989451 @default.
- W142971406 creator A5060995243 @default.
- W142971406 creator A5068245992 @default.
- W142971406 creator A5074310568 @default.
- W142971406 date "2009-01-01" @default.
- W142971406 modified "2023-09-26" @default.
- W142971406 title "Metal-oxide-semiconductor devices on p-type Ge with La[sub 2]O[sub 3] and ZrO[sub 2]/La[sub 2]O[sub 3] as gate dielectric and the effect of postmetallization anneal" @default.
- W142971406 cites W1524924195 @default.
- W142971406 cites W1612849470 @default.
- W142971406 cites W1649289083 @default.
- W142971406 cites W1968406658 @default.
- W142971406 cites W1984167409 @default.
- W142971406 cites W1990210271 @default.
- W142971406 cites W2003110559 @default.
- W142971406 cites W2032168709 @default.
- W142971406 cites W2090930972 @default.
- W142971406 cites W2109726417 @default.
- W142971406 cites W2120317696 @default.
- W142971406 doi "https://doi.org/10.1116/1.3043533" @default.
- W142971406 hasPublicationYear "2009" @default.
- W142971406 type Work @default.
- W142971406 sameAs 142971406 @default.
- W142971406 citedByCount "9" @default.
- W142971406 countsByYear W1429714062012 @default.
- W142971406 countsByYear W1429714062014 @default.
- W142971406 countsByYear W1429714062016 @default.
- W142971406 crossrefType "journal-article" @default.
- W142971406 hasAuthorship W142971406A5003989108 @default.
- W142971406 hasAuthorship W142971406A5018899317 @default.
- W142971406 hasAuthorship W142971406A5022989451 @default.
- W142971406 hasAuthorship W142971406A5060995243 @default.
- W142971406 hasAuthorship W142971406A5068245992 @default.
- W142971406 hasAuthorship W142971406A5074310568 @default.
- W142971406 hasConcept C108225325 @default.
- W142971406 hasConcept C119599485 @default.
- W142971406 hasConcept C127413603 @default.
- W142971406 hasConcept C133386390 @default.
- W142971406 hasConcept C16317505 @default.
- W142971406 hasConcept C165801399 @default.
- W142971406 hasConcept C166972891 @default.
- W142971406 hasConcept C172385210 @default.
- W142971406 hasConcept C191897082 @default.
- W142971406 hasConcept C192562407 @default.
- W142971406 hasConcept C199360897 @default.
- W142971406 hasConcept C212702 @default.
- W142971406 hasConcept C2361726 @default.
- W142971406 hasConcept C2777855556 @default.
- W142971406 hasConcept C2779851234 @default.
- W142971406 hasConcept C41008148 @default.
- W142971406 hasConcept C49040817 @default.
- W142971406 hasConcept C51140833 @default.
- W142971406 hasConcept C52192207 @default.
- W142971406 hasConcept C52780932 @default.
- W142971406 hasConcept C9395851 @default.
- W142971406 hasConceptScore W142971406C108225325 @default.
- W142971406 hasConceptScore W142971406C119599485 @default.
- W142971406 hasConceptScore W142971406C127413603 @default.
- W142971406 hasConceptScore W142971406C133386390 @default.
- W142971406 hasConceptScore W142971406C16317505 @default.
- W142971406 hasConceptScore W142971406C165801399 @default.
- W142971406 hasConceptScore W142971406C166972891 @default.
- W142971406 hasConceptScore W142971406C172385210 @default.
- W142971406 hasConceptScore W142971406C191897082 @default.
- W142971406 hasConceptScore W142971406C192562407 @default.
- W142971406 hasConceptScore W142971406C199360897 @default.
- W142971406 hasConceptScore W142971406C212702 @default.
- W142971406 hasConceptScore W142971406C2361726 @default.
- W142971406 hasConceptScore W142971406C2777855556 @default.
- W142971406 hasConceptScore W142971406C2779851234 @default.
- W142971406 hasConceptScore W142971406C41008148 @default.
- W142971406 hasConceptScore W142971406C49040817 @default.
- W142971406 hasConceptScore W142971406C51140833 @default.
- W142971406 hasConceptScore W142971406C52192207 @default.
- W142971406 hasConceptScore W142971406C52780932 @default.
- W142971406 hasConceptScore W142971406C9395851 @default.
- W142971406 hasIssue "1" @default.
- W142971406 hasLocation W1429714061 @default.
- W142971406 hasOpenAccess W142971406 @default.
- W142971406 hasPrimaryLocation W1429714061 @default.
- W142971406 hasRelatedWork W1985621513 @default.
- W142971406 hasRelatedWork W1986396176 @default.
- W142971406 hasRelatedWork W2002143605 @default.
- W142971406 hasRelatedWork W2065680623 @default.
- W142971406 hasRelatedWork W2074099177 @default.
- W142971406 hasRelatedWork W2145602686 @default.
- W142971406 hasRelatedWork W2157582111 @default.
- W142971406 hasRelatedWork W2541575124 @default.
- W142971406 hasRelatedWork W2903976092 @default.
- W142971406 hasRelatedWork W2566287400 @default.
- W142971406 hasVolume "27" @default.
- W142971406 isParatext "false" @default.
- W142971406 isRetracted "false" @default.
- W142971406 magId "142971406" @default.
- W142971406 workType "article" @default.