Matches in SemOpenAlex for { <https://semopenalex.org/work/W143220864> ?p ?o ?g. }
Showing items 1 to 77 of
77
with 100 items per page.
- W143220864 endingPage "117" @default.
- W143220864 startingPage "111" @default.
- W143220864 abstract "Plasma chemical vapor deposition of hexamethyldisilazane was investigated for its applicability as solubility controlled gas separation membranes. Substrates were porous inorganic membranes (Anotec: 0.02 µ) for permeation measurements and silicon wafers for deposition rate, density, and infrared measurements. To ensure a uniform membrane on the porous support a deposit of five times the pore diameter was required. Membranes deposited at 2.45 GHz from HMDSN/O2 mixtures exhibit a high deposition rate (1.8 nm · s−1) and a wide density range (1.15–1.60 g · cm−3). — Typical nitrogen permeation rate of a 100 nm film was 2 · 10−8 m3 (STP) s−1 m−2 Pa−1. Permeation rates of CO2 and C4H10 related to N2 and the thermal dependence indicate that the permeation is viscosity controlled. These films exhibit a microgel-like structure with an estimated pore diameter of 2 nm. Anodic films prepared in a 13.56 MHz parallel plate reactor at low deposition rate (0.3 nm · s−1) have densities between 1.3 and 1.5 g · cm−3. They exhibit an infrared absorption of the ·:CH3 vibration at ∼1260 cm−1, which is an easy accessible indication of crosslinking and oxidation of more than twice than in microwave plasma films. For an 0.6-µm anodic film an ideal separation factor for CO2/N2 and C4H10/N2 of ∼6 is obtained, which is comparable to that of 1-µm conventional polydimethylsiloxane." @default.
- W143220864 created "2016-06-24" @default.
- W143220864 creator A5057007366 @default.
- W143220864 creator A5070073995 @default.
- W143220864 date "2007-12-12" @default.
- W143220864 modified "2023-09-27" @default.
- W143220864 title "Preparation and characterization of glassy plasma polymer membranes" @default.
- W143220864 cites W2060935387 @default.
- W143220864 cites W2108589203 @default.
- W143220864 cites W581604912 @default.
- W143220864 doi "https://doi.org/10.1007/bfb0114819" @default.
- W143220864 hasPublicationYear "2007" @default.
- W143220864 type Work @default.
- W143220864 sameAs 143220864 @default.
- W143220864 citedByCount "10" @default.
- W143220864 countsByYear W1432208642015 @default.
- W143220864 countsByYear W1432208642022 @default.
- W143220864 crossrefType "book-chapter" @default.
- W143220864 hasAuthorship W143220864A5057007366 @default.
- W143220864 hasAuthorship W143220864A5070073995 @default.
- W143220864 hasConcept C113196181 @default.
- W143220864 hasConcept C127413603 @default.
- W143220864 hasConcept C151730666 @default.
- W143220864 hasConcept C159985019 @default.
- W143220864 hasConcept C160671074 @default.
- W143220864 hasConcept C171250308 @default.
- W143220864 hasConcept C185592680 @default.
- W143220864 hasConcept C192562407 @default.
- W143220864 hasConcept C2779849746 @default.
- W143220864 hasConcept C2816523 @default.
- W143220864 hasConcept C41625074 @default.
- W143220864 hasConcept C42360764 @default.
- W143220864 hasConcept C43617362 @default.
- W143220864 hasConcept C50670333 @default.
- W143220864 hasConcept C521977710 @default.
- W143220864 hasConcept C55493867 @default.
- W143220864 hasConcept C57410435 @default.
- W143220864 hasConcept C64297162 @default.
- W143220864 hasConcept C86803240 @default.
- W143220864 hasConceptScore W143220864C113196181 @default.
- W143220864 hasConceptScore W143220864C127413603 @default.
- W143220864 hasConceptScore W143220864C151730666 @default.
- W143220864 hasConceptScore W143220864C159985019 @default.
- W143220864 hasConceptScore W143220864C160671074 @default.
- W143220864 hasConceptScore W143220864C171250308 @default.
- W143220864 hasConceptScore W143220864C185592680 @default.
- W143220864 hasConceptScore W143220864C192562407 @default.
- W143220864 hasConceptScore W143220864C2779849746 @default.
- W143220864 hasConceptScore W143220864C2816523 @default.
- W143220864 hasConceptScore W143220864C41625074 @default.
- W143220864 hasConceptScore W143220864C42360764 @default.
- W143220864 hasConceptScore W143220864C43617362 @default.
- W143220864 hasConceptScore W143220864C50670333 @default.
- W143220864 hasConceptScore W143220864C521977710 @default.
- W143220864 hasConceptScore W143220864C55493867 @default.
- W143220864 hasConceptScore W143220864C57410435 @default.
- W143220864 hasConceptScore W143220864C64297162 @default.
- W143220864 hasConceptScore W143220864C86803240 @default.
- W143220864 hasLocation W1432208641 @default.
- W143220864 hasOpenAccess W143220864 @default.
- W143220864 hasPrimaryLocation W1432208641 @default.
- W143220864 hasRelatedWork W1974780689 @default.
- W143220864 hasRelatedWork W2001478519 @default.
- W143220864 hasRelatedWork W2032402932 @default.
- W143220864 hasRelatedWork W2088195174 @default.
- W143220864 hasRelatedWork W2148822531 @default.
- W143220864 hasRelatedWork W2367121258 @default.
- W143220864 hasRelatedWork W2914128274 @default.
- W143220864 hasRelatedWork W2997016554 @default.
- W143220864 hasRelatedWork W3200838690 @default.
- W143220864 hasRelatedWork W4200540114 @default.
- W143220864 isParatext "false" @default.
- W143220864 isRetracted "false" @default.
- W143220864 magId "143220864" @default.
- W143220864 workType "book-chapter" @default.