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- W143636117 abstract "The diffusion of implanted phosphorus in germanium was accelerated by irradiation with H/sub 2//sup +/ ions of 600 and 1000 keV energies at temperatures of 400, 500, and 600 /sup 0/C. The density of the hydrogen ion current was 1 ..mu..A/cm/sup 2/ and the duration of irradiation was 2 h. When the irradiation took place at 400 /sup 0/C, the phosphorus impurity was found to be concentrated both near the surface and near the range R/sub p/ of the approx.300 keV protons (in this case the H/sub 2//sup +/ energy was 600 keV). At higher irradiation temperatures only 1--2% of the implanted phosphorus was detected and it was located at a depth of 10--20 ..mu... The depth of penetration and the amount of phosphorus penetrating to considerable distances from the surfaces were a function of the irradiation temperature and the energy of the bombarding particles. Likely diffusion-acceleration processes were analyzed." @default.
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- W143636117 date "1979-03-01" @default.
- W143636117 modified "2023-09-24" @default.
- W143636117 title "Radiation-accelerated diffusion of phosphorus in germanium" @default.
- W143636117 hasPublicationYear "1979" @default.
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