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- W14380683 abstract "Process and device simulators are used to project the long term manufacturing distributions of 0.35 µm, planarized, concave transistors. Particular care is taken to calibrate the simulators, and to quantify the contribution from each manufacturing source of variation." @default.
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- W14380683 date "1993-01-01" @default.
- W14380683 modified "2023-09-23" @default.
- W14380683 title "Predicting Manufacturing Variabilities for Deep Submicron Technologies: Integration of Process, Device, and Statistical Simulations" @default.
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- W14380683 doi "https://doi.org/10.1007/978-3-7091-6657-4_56" @default.
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