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- W144076218 abstract "Plasmas excited by radio-frequency (rf) power have nonlinear impedance characteristics. This causes the plasma state to depend on the nature of the circuitry that supplies electrical power to the plasma. This dependency occurs because the harmonics of the drive frequency, which are generated by the plasma nonlinearity, interact with the impedance of the external circuitry at the harmonic frequencies. The authors describe the use of a low-pass rf filter in the power feed to the plasma in the GEC RF Reference Cell. The filter successfully isolates the plasma and eliminates its sensitivity to changes in the rf generator, cable plant, and matching network." @default.
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- W144076218 date "1992-12-01" @default.
- W144076218 modified "2023-09-24" @default.
- W144076218 title "Electrical isolation of RF plasma discharges" @default.
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