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- W144563582 abstract "Diamond-like carbon (DLC) coating was studied to be a good tribological problem-solver due to its low friction characteristics and high hardness. However, generally hydrogenated DLC film has shown a weak thermal stability above . However, the silicon doping DLC process by DC pulse plasma enhanced chemical vapor deposition (PECVD) for the new DLC coating which has a good characterization with thermal stability at high temperature itself has been observed. And we were discussed a process for optimizing silicon content to promote a good thermal stability using various tetramethylsilane (TMS) and methane gas at high-temperature. The chemical compositions of silicon-containing DLC film was analyzed using X-ray photoelectron spectroscopy (XPS) before and after heat treatment. Raman spectrum analysis showed the changed structure on the surface after the high-temperature exposure testing. In particular, the hardness of silicon-containing DLC film showed different values before and after the annealing treatment." @default.
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- W144563582 date "2010-01-01" @default.
- W144563582 modified "2023-09-24" @default.
- W144563582 title "Thermal Stability of Silicon-containing Diamond-like Carbon Film" @default.
- W144563582 doi "https://doi.org/10.12656/jksht.2010.23.2.083" @default.
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