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- W144771116 endingPage "177" @default.
- W144771116 startingPage "85" @default.
- W144771116 abstract "This chapter addresses in-use failures of MEMS, with an emphasis on the physics of failure. Chapter 3 dealt with eliminating failures from a design and manufacturing perspective. In this chapter we focus on how a well-designed, fabricated and packaged device can fail in use. There is a tight link between the design, manufacturing and in-use failures. Understanding the physics of failure (e.g., creep, fatigue) and the properties of materials used and the link to the process flow (e.g., yield strength of poly-silicon following HF release) lead to improved design rules to ensure the device will operate reliably in the expected operating environment. A concurrent design of the package is often required, but is not addressed in this chapter." @default.
- W144771116 created "2016-06-24" @default.
- W144771116 creator A5018715777 @default.
- W144771116 creator A5031951594 @default.
- W144771116 creator A5046878537 @default.
- W144771116 date "2010-09-06" @default.
- W144771116 modified "2023-10-01" @default.
- W144771116 title "In-Use Failures" @default.
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