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- W144889437 abstract "The thickness of the native oxide on Si wafers as measured by XPS was shown to be a strong function of the crystalline orientation. The angular dependent curves for photoelectron intensity from the crystalline Si wafer had large peaks and valleys for different crystalline planes on which the take-off angles were scanned, while the angular dependent curve for photoemission from the amorphous oxide layer did not. This difference was concluded to account for the angular dependence of the thickness for the oxide layer measured by XPS. The strong dependence of photoemission from the crystal was attributed either to a phenomenon known as the photoelectron forward scattering or to photoelectron diffraction." @default.
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- W144889437 date "1994-01-01" @default.
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- W144889437 title "Effect of crystalline orientation on native oxide thickness measured by XPS" @default.
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- W144889437 doi "https://doi.org/10.1016/b978-0-444-81889-8.50081-x" @default.
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