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- W1451542892 endingPage "536" @default.
- W1451542892 startingPage "531" @default.
- W1451542892 abstract "For the analysis of fluorine materials and 3d transition metals by soft-x-ray absorption spectroscopy, A new diffraction grating with multilayer coating was installed at the BL-10 beamline of the NewSUBARU synchrotron light source. The target photon energy range of this grating is from 500 eV to 1,000 eV, which includes absorption edges of fluorine and 3d transition metals. The beam intensity of BL-10 in this range was very low due to low reflectance of the diffraction grating for the usage of monochromator. In order to obtaining high reflectance, we developed wideband W/Si multilayer and this multilayer was coated on a new diffraction grating. The reflectance of this multilayer was approximately 13-times higher than that of previous Ni single layer at the fluorine absorption energy edge of 697 eV. The beam intensity at the energy of 697 eV using the new diffraction grating was over 40 times stronger than that using the previous Ni-coated diffraction grating. As the result, using the new diffraction grating, it can be observed that the high-quality absorption spectrum of EUV resist at the absorption edge of fluorine and standard materials of 3d transition metals. The results show that the W/Si multilayer coating significantly improved the performance of the grating at the target energy range." @default.
- W1451542892 created "2016-06-24" @default.
- W1451542892 creator A5015360286 @default.
- W1451542892 creator A5018497095 @default.
- W1451542892 creator A5034988273 @default.
- W1451542892 creator A5056600742 @default.
- W1451542892 creator A5065566936 @default.
- W1451542892 creator A5083543360 @default.
- W1451542892 creator A5090489509 @default.
- W1451542892 date "2015-01-01" @default.
- W1451542892 modified "2023-10-17" @default.
- W1451542892 title "Development of High-Reflective W/Si-multilayer Diffraction Grating for the Analysis of Fluorine Materials" @default.
- W1451542892 cites W1571729639 @default.
- W1451542892 cites W1967828814 @default.
- W1451542892 cites W1970601924 @default.
- W1451542892 cites W2014883235 @default.
- W1451542892 doi "https://doi.org/10.2494/photopolymer.28.531" @default.
- W1451542892 hasPublicationYear "2015" @default.
- W1451542892 type Work @default.
- W1451542892 sameAs 1451542892 @default.
- W1451542892 citedByCount "22" @default.
- W1451542892 countsByYear W14515428922016 @default.
- W1451542892 countsByYear W14515428922017 @default.
- W1451542892 countsByYear W14515428922018 @default.
- W1451542892 countsByYear W14515428922019 @default.
- W1451542892 countsByYear W14515428922020 @default.
- W1451542892 countsByYear W14515428922021 @default.
- W1451542892 countsByYear W14515428922022 @default.
- W1451542892 countsByYear W14515428922023 @default.
- W1451542892 crossrefType "journal-article" @default.
- W1451542892 hasAuthorship W1451542892A5015360286 @default.
- W1451542892 hasAuthorship W1451542892A5018497095 @default.
- W1451542892 hasAuthorship W1451542892A5034988273 @default.
- W1451542892 hasAuthorship W1451542892A5056600742 @default.
- W1451542892 hasAuthorship W1451542892A5065566936 @default.
- W1451542892 hasAuthorship W1451542892A5083543360 @default.
- W1451542892 hasAuthorship W1451542892A5090489509 @default.
- W1451542892 hasBestOaLocation W14515428921 @default.
- W1451542892 hasConcept C120665830 @default.
- W1451542892 hasConcept C121332964 @default.
- W1451542892 hasConcept C125287762 @default.
- W1451542892 hasConcept C126753812 @default.
- W1451542892 hasConcept C136959337 @default.
- W1451542892 hasConcept C14112920 @default.
- W1451542892 hasConcept C159985019 @default.
- W1451542892 hasConcept C168834538 @default.
- W1451542892 hasConcept C181966813 @default.
- W1451542892 hasConcept C187384414 @default.
- W1451542892 hasConcept C191897082 @default.
- W1451542892 hasConcept C192562407 @default.
- W1451542892 hasConcept C207114421 @default.
- W1451542892 hasConcept C2777813233 @default.
- W1451542892 hasConcept C49040817 @default.
- W1451542892 hasConcept C506198293 @default.
- W1451542892 hasConcept C50792271 @default.
- W1451542892 hasConcept C6260449 @default.
- W1451542892 hasConceptScore W1451542892C120665830 @default.
- W1451542892 hasConceptScore W1451542892C121332964 @default.
- W1451542892 hasConceptScore W1451542892C125287762 @default.
- W1451542892 hasConceptScore W1451542892C126753812 @default.
- W1451542892 hasConceptScore W1451542892C136959337 @default.
- W1451542892 hasConceptScore W1451542892C14112920 @default.
- W1451542892 hasConceptScore W1451542892C159985019 @default.
- W1451542892 hasConceptScore W1451542892C168834538 @default.
- W1451542892 hasConceptScore W1451542892C181966813 @default.
- W1451542892 hasConceptScore W1451542892C187384414 @default.
- W1451542892 hasConceptScore W1451542892C191897082 @default.
- W1451542892 hasConceptScore W1451542892C192562407 @default.
- W1451542892 hasConceptScore W1451542892C207114421 @default.
- W1451542892 hasConceptScore W1451542892C2777813233 @default.
- W1451542892 hasConceptScore W1451542892C49040817 @default.
- W1451542892 hasConceptScore W1451542892C506198293 @default.
- W1451542892 hasConceptScore W1451542892C50792271 @default.
- W1451542892 hasConceptScore W1451542892C6260449 @default.
- W1451542892 hasIssue "4" @default.
- W1451542892 hasLocation W14515428921 @default.
- W1451542892 hasOpenAccess W1451542892 @default.
- W1451542892 hasPrimaryLocation W14515428921 @default.
- W1451542892 hasRelatedWork W1628936870 @default.
- W1451542892 hasRelatedWork W178105554 @default.
- W1451542892 hasRelatedWork W2012127141 @default.
- W1451542892 hasRelatedWork W2012747148 @default.
- W1451542892 hasRelatedWork W2031934027 @default.
- W1451542892 hasRelatedWork W2040790339 @default.
- W1451542892 hasRelatedWork W2050705723 @default.
- W1451542892 hasRelatedWork W2353048007 @default.
- W1451542892 hasRelatedWork W2557424095 @default.
- W1451542892 hasRelatedWork W2901096122 @default.
- W1451542892 hasVolume "28" @default.
- W1451542892 isParatext "false" @default.
- W1451542892 isRetracted "false" @default.
- W1451542892 magId "1451542892" @default.
- W1451542892 workType "article" @default.