Matches in SemOpenAlex for { <https://semopenalex.org/work/W146511912> ?p ?o ?g. }
- W146511912 endingPage "181" @default.
- W146511912 startingPage "139" @default.
- W146511912 abstract "Due to significant theoretical and technological new advances, nanostructuring of surfaces has attracted a great deal of scientific interest. The continuous demand for shrinking the dimensions of structures to reach the nanometer scale is mainly motivated by the discovery of new behaviors dominated by unique properties that are encountered when nanosize dimensions are approached (e.g., quantum confinement). Additionally, a major thrust for shrinking dimensions originates from the microelectronic field requiring the development of smaller devices, system integration, and system diversification. Thus, electronic materials as well as integrated materials adding new features must be structured at the micro- and nanometer scale." @default.
- W146511912 created "2016-06-24" @default.
- W146511912 creator A5033550092 @default.
- W146511912 creator A5053671712 @default.
- W146511912 date "2009-01-01" @default.
- W146511912 modified "2023-09-25" @default.
- W146511912 title "Direct Writing Techniques: Electron Beam and Focused Ion Beam" @default.
- W146511912 cites W1574798849 @default.
- W146511912 cites W1783686700 @default.
- W146511912 cites W1965122089 @default.
- W146511912 cites W1965702561 @default.
- W146511912 cites W1965746848 @default.
- W146511912 cites W1966041073 @default.
- W146511912 cites W1966470457 @default.
- W146511912 cites W1967331740 @default.
- W146511912 cites W1967912910 @default.
- W146511912 cites W1968974130 @default.
- W146511912 cites W1970124737 @default.
- W146511912 cites W1972909553 @default.
- W146511912 cites W1975096613 @default.
- W146511912 cites W1975439088 @default.
- W146511912 cites W1975913162 @default.
- W146511912 cites W1977399155 @default.
- W146511912 cites W1978566414 @default.
- W146511912 cites W1978951639 @default.
- W146511912 cites W1982607285 @default.
- W146511912 cites W1984524120 @default.
- W146511912 cites W1985559482 @default.
- W146511912 cites W1985597659 @default.
- W146511912 cites W1987910133 @default.
- W146511912 cites W1988048743 @default.
- W146511912 cites W1989003107 @default.
- W146511912 cites W1990139414 @default.
- W146511912 cites W1991615398 @default.
- W146511912 cites W1992214794 @default.
- W146511912 cites W1992616204 @default.
- W146511912 cites W1993806407 @default.
- W146511912 cites W1994674287 @default.
- W146511912 cites W1995961444 @default.
- W146511912 cites W1996440898 @default.
- W146511912 cites W1996816963 @default.
- W146511912 cites W1996900454 @default.
- W146511912 cites W1998035500 @default.
- W146511912 cites W1998620742 @default.
- W146511912 cites W2002410246 @default.
- W146511912 cites W2002670802 @default.
- W146511912 cites W2003684713 @default.
- W146511912 cites W2004107340 @default.
- W146511912 cites W2005562024 @default.
- W146511912 cites W2006649928 @default.
- W146511912 cites W2007996522 @default.
- W146511912 cites W2008712026 @default.
- W146511912 cites W2010230558 @default.
- W146511912 cites W2012933113 @default.
- W146511912 cites W2014199868 @default.
- W146511912 cites W2019708504 @default.
- W146511912 cites W2024277794 @default.
- W146511912 cites W2024334486 @default.
- W146511912 cites W2024727431 @default.
- W146511912 cites W2025116097 @default.
- W146511912 cites W2025518778 @default.
- W146511912 cites W2027789450 @default.
- W146511912 cites W2029169153 @default.
- W146511912 cites W2029757493 @default.
- W146511912 cites W2030471852 @default.
- W146511912 cites W2031976519 @default.
- W146511912 cites W2033139625 @default.
- W146511912 cites W2033248441 @default.
- W146511912 cites W2034184378 @default.
- W146511912 cites W2037262864 @default.
- W146511912 cites W2038687793 @default.
- W146511912 cites W2038890548 @default.
- W146511912 cites W2039202450 @default.
- W146511912 cites W2040590586 @default.
- W146511912 cites W2042087042 @default.
- W146511912 cites W2043163459 @default.
- W146511912 cites W2044503260 @default.
- W146511912 cites W2046362529 @default.
- W146511912 cites W2047048769 @default.
- W146511912 cites W2049300627 @default.
- W146511912 cites W2051197992 @default.
- W146511912 cites W2052335316 @default.
- W146511912 cites W2052778580 @default.
- W146511912 cites W2055443710 @default.
- W146511912 cites W2055569508 @default.
- W146511912 cites W2055982282 @default.
- W146511912 cites W2056662466 @default.
- W146511912 cites W2059438850 @default.
- W146511912 cites W2061267700 @default.
- W146511912 cites W2067578066 @default.
- W146511912 cites W2068009609 @default.
- W146511912 cites W2070898515 @default.
- W146511912 cites W2071620103 @default.
- W146511912 cites W2072134727 @default.
- W146511912 cites W2072853621 @default.
- W146511912 cites W2074179993 @default.
- W146511912 cites W2075321243 @default.
- W146511912 cites W2076633515 @default.