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- W146574744 abstract "MOS capacitor devices with transition metals as gates are sensitive indicators of hydrogen and certain hydrocarbon gases. Devices with gate metals of palladium, platinum and nickel were tested in hydrogen, methane, butane and carbon monoxide. Electrical parameter changes due to absorption of the gases by the gate metals were measured using high frequency and low frequency C-V techniques. Absorption times were measured with the aid of a circuit which maintained a constant capacitance across the MOS structure, enabling a direct real time observation of the absorption characteristic. Voltage changes of -1240 mV were observed in Pd-gate devices for 760 torr at 20°C. The absorption time was 190 msec for these conditions. Analysis of test data shows there is no additional accumulation of charge at the SiO2-Si interface or in the dielectric itself, and suggests the detection mechanism is a change in the transition metal work function upon absorption of hydrogen or hydrocarbon gases. Tests of devices with both n type and p type silicon substrates and with dielectric of SiO2 and Si3N4 are presented." @default.
- W146574744 created "2016-06-24" @default.
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- W146574744 date "1982-01-01" @default.
- W146574744 modified "2023-10-18" @default.
- W146574744 title "ABSORPTION PROPERTIES OF MOS STRUCTURES WITH TRANSITION METAL GATES" @default.
- W146574744 doi "https://doi.org/10.1016/b978-0-08-027311-2.50021-8" @default.
- W146574744 hasPublicationYear "1982" @default.
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