Matches in SemOpenAlex for { <https://semopenalex.org/work/W1469518786> ?p ?o ?g. }
- W1469518786 endingPage "677" @default.
- W1469518786 startingPage "672" @default.
- W1469518786 abstract "Amorphous ZnSnOx (ZTO) films were prepared using plasma-enhanced atomic layer deposition (PEALD) in a temperature range of 100–200 °C. Metal-organic precursors of Sn(dmamp)2 (dmamp = bis(1-dimethylamino-2-methyl-2-propoxide) and diethylzinc were employed as sources of Sn and Zn, respectively, in combination with O2 plasma as a reactant. Sn levels in the ZTO films were controlled by varying the SnO2/ZnO cycle ratio from 0 to 8. According to the growth behaviour of the ZTO film by alternating SnO2 and ZnO PEALD cycles, it was observed that ZnO growth on Sn-rich ZTO film is retarded, whereas SnO2 growth is enhanced on Zn-rich ZTO film. The chemical states of the ZTO films were confirmed by X-ray photoelectron spectroscopy (XPS); the chemical compositions of the ZTO films were characterised by XPS depth profiling. Grazing-angle X-ray diffraction revealed that the PEALD ZTO films possess an amorphous structure, irrespective of Sn levels from 20 to 59 at.%. ZTO films with intermediate Sn at.% exhibited smooth surface morphology compared to binary ZnO and SnO2 films. Additionally, the step coverage of a ZTO film deposited on hole pattern with an aspect ratio of 8 and opening diameter of 110 nm was about 93%, suggesting the realisation of self-limited growth." @default.
- W1469518786 created "2016-06-24" @default.
- W1469518786 creator A5000616713 @default.
- W1469518786 creator A5007164438 @default.
- W1469518786 creator A5011233891 @default.
- W1469518786 creator A5029784091 @default.
- W1469518786 creator A5033823697 @default.
- W1469518786 creator A5038056256 @default.
- W1469518786 creator A5077700350 @default.
- W1469518786 creator A5082244236 @default.
- W1469518786 date "2015-12-01" @default.
- W1469518786 modified "2023-10-16" @default.
- W1469518786 title "Growth of amorphous zinc tin oxide films using plasma-enhanced atomic layer deposition from bis(1-dimethylamino-2-methyl-2propoxy)tin, diethylzinc, and oxygen plasma" @default.
- W1469518786 cites W1967048546 @default.
- W1469518786 cites W1972173767 @default.
- W1469518786 cites W1975823940 @default.
- W1469518786 cites W1975891145 @default.
- W1469518786 cites W1994501450 @default.
- W1469518786 cites W1998922674 @default.
- W1469518786 cites W2004557350 @default.
- W1469518786 cites W2008503622 @default.
- W1469518786 cites W2010540469 @default.
- W1469518786 cites W2010575114 @default.
- W1469518786 cites W2012673327 @default.
- W1469518786 cites W2012979559 @default.
- W1469518786 cites W2015510023 @default.
- W1469518786 cites W2018540978 @default.
- W1469518786 cites W2040477943 @default.
- W1469518786 cites W2041632127 @default.
- W1469518786 cites W2044804528 @default.
- W1469518786 cites W2049817780 @default.
- W1469518786 cites W2050306260 @default.
- W1469518786 cites W2064938713 @default.
- W1469518786 cites W2069010267 @default.
- W1469518786 cites W2077268162 @default.
- W1469518786 cites W2078624450 @default.
- W1469518786 cites W2086885272 @default.
- W1469518786 cites W2087303001 @default.
- W1469518786 cites W2090073355 @default.
- W1469518786 cites W2093215950 @default.
- W1469518786 cites W2141170334 @default.
- W1469518786 cites W2327053476 @default.
- W1469518786 cites W2333200533 @default.
- W1469518786 doi "https://doi.org/10.1016/j.apsusc.2015.09.062" @default.
- W1469518786 hasPublicationYear "2015" @default.
- W1469518786 type Work @default.
- W1469518786 sameAs 1469518786 @default.
- W1469518786 citedByCount "7" @default.
- W1469518786 countsByYear W14695187862018 @default.
- W1469518786 countsByYear W14695187862019 @default.
- W1469518786 countsByYear W14695187862020 @default.
- W1469518786 countsByYear W14695187862021 @default.
- W1469518786 countsByYear W14695187862022 @default.
- W1469518786 crossrefType "journal-article" @default.
- W1469518786 hasAuthorship W1469518786A5000616713 @default.
- W1469518786 hasAuthorship W1469518786A5007164438 @default.
- W1469518786 hasAuthorship W1469518786A5011233891 @default.
- W1469518786 hasAuthorship W1469518786A5029784091 @default.
- W1469518786 hasAuthorship W1469518786A5033823697 @default.
- W1469518786 hasAuthorship W1469518786A5038056256 @default.
- W1469518786 hasAuthorship W1469518786A5077700350 @default.
- W1469518786 hasAuthorship W1469518786A5082244236 @default.
- W1469518786 hasConcept C113196181 @default.
- W1469518786 hasConcept C127413603 @default.
- W1469518786 hasConcept C171250308 @default.
- W1469518786 hasConcept C175708663 @default.
- W1469518786 hasConcept C178790620 @default.
- W1469518786 hasConcept C185592680 @default.
- W1469518786 hasConcept C19067145 @default.
- W1469518786 hasConcept C191897082 @default.
- W1469518786 hasConcept C192562407 @default.
- W1469518786 hasConcept C42360764 @default.
- W1469518786 hasConcept C525849907 @default.
- W1469518786 hasConcept C535196362 @default.
- W1469518786 hasConcept C56052488 @default.
- W1469518786 hasConcept C69544855 @default.
- W1469518786 hasConcept C8010536 @default.
- W1469518786 hasConceptScore W1469518786C113196181 @default.
- W1469518786 hasConceptScore W1469518786C127413603 @default.
- W1469518786 hasConceptScore W1469518786C171250308 @default.
- W1469518786 hasConceptScore W1469518786C175708663 @default.
- W1469518786 hasConceptScore W1469518786C178790620 @default.
- W1469518786 hasConceptScore W1469518786C185592680 @default.
- W1469518786 hasConceptScore W1469518786C19067145 @default.
- W1469518786 hasConceptScore W1469518786C191897082 @default.
- W1469518786 hasConceptScore W1469518786C192562407 @default.
- W1469518786 hasConceptScore W1469518786C42360764 @default.
- W1469518786 hasConceptScore W1469518786C525849907 @default.
- W1469518786 hasConceptScore W1469518786C535196362 @default.
- W1469518786 hasConceptScore W1469518786C56052488 @default.
- W1469518786 hasConceptScore W1469518786C69544855 @default.
- W1469518786 hasConceptScore W1469518786C8010536 @default.
- W1469518786 hasFunder F4320322030 @default.
- W1469518786 hasLocation W14695187861 @default.
- W1469518786 hasOpenAccess W1469518786 @default.
- W1469518786 hasPrimaryLocation W14695187861 @default.
- W1469518786 hasRelatedWork W1678078026 @default.
- W1469518786 hasRelatedWork W2024792716 @default.