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• W147606375 abstract "This thesis presents the design of the mechanical and electrical structure of a novel interaction force sensor, in which a micro-gripper can be easily integrated. Independent force/torque detection in six degrees of freedom (DOF), a wide force range (a few mN) and a high resolution (at μN and μNmm level) are obtained. Piezoresistors are used for the detection of the interaction force due to the suitable force range and resolution. The interaction force sensor is fabricated with integrated circuit (IC) compatible processes.In the micro-handling domain, micro-grippers are used for applications in micro-manipulation, life science and micro-surgery. In these fields, the micro-parts to handle have dimensions from a few μm to hundreds of μm. Typically, force sensing with μN and sub-μN resolutions over a range of a few mN is needed. The lack of interaction force sensing, in current micro-grippers, limits the applications in these fields. Current external devices, able to detect the interaction force along multiple DOF, are difficult to be used in a micro-gripper due to assembly and calibration problems. Therefore there is the need for high resolution, six DOF interaction force monitoring integrated within micro-grippers.In this thesis, a mechanical and electrical study is carried out for the development of the interaction force sensor according to typical requirements in micro-handling. Three different concepts are considered, all consisting of several beams with multiple integrated piezoresistors. Parameters such as dimensions and shape of the beams as well as the piezoresistor number and connections are taken into account in the design process. The different concepts are evaluated and compared based on their resolution, sensitivity, crosstalk, stiffness, dimensions, number of piezoresistors and the accessibility of the gripper.The final design of the interaction force sensor has a dimension of 3 x 1.5 x 0.03 mm3 and it is capable of measuring six DOF independently, using 16 silicon integrated piezoresistors. Finite element models (FEM) show that resolutions between 1.5 – 8.5 μN and 2 – 10.5 μNmm could be reached, for respectively force and torque measurement. Force/torques up to 30 mN and 37 mNmm can be measured.A micro-gripper fabricated by IC compatible processes can be easily integrated in the interaction force sensor. However, the heat generation of the gripper has to be taken into account, since it causes thermal expansion (and therefore stresses) in the sensor. This effect influences the performance of the interaction force sensor in terms of crosstalk and resolution. The influence on the performance due to the heat generation of a thermal micro-gripper is studied.The fabrication of the interaction force sensor is done at the Delft Institute for Microsystems and Nanoelectronics (DIMES). An experimental setup is also proposed to validate the theoretical performance of the fabricated interaction force sensor." @default.
• W147606375 created "2016-06-24" @default.
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• W147606375 date "2010-06-18" @default.
• W147606375 modified "2023-09-24" @default.
• W147606375 title "Development of a novel 6 DOF interaction force sensor for micro-gripper applications:" @default.
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