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- W147940244 abstract "Recently ion beam etching of electron beam deposited metal layers on C has resulted in higher x-ray reflection coefficients 1 . In spite of the widely recognized importance of Mo/Si multilayer coatings for projection lithography, little work has been done to use the etching technique on multilayer mirrors made of this combination of materials. As Mo/Si multilayer mirrors of d-values greater than 12 nm. have already been made with reflectivities very close to the theoretical maximum 2 , our main interest is in multilayers with smaller d-values." @default.
- W147940244 created "2016-06-24" @default.
- W147940244 creator A5001506048 @default.
- W147940244 creator A5009882600 @default.
- W147940244 creator A5038483503 @default.
- W147940244 creator A5052630741 @default.
- W147940244 creator A5085397681 @default.
- W147940244 date "1992-01-01" @default.
- W147940244 modified "2023-09-27" @default.
- W147940244 title "Limits to Ion Beam etching of Mo / Si multilayer coatings" @default.
- W147940244 cites W2012386367 @default.
- W147940244 cites W2036837577 @default.
- W147940244 doi "https://doi.org/10.1364/pxrayms.1992.pd6" @default.
- W147940244 hasPublicationYear "1992" @default.
- W147940244 type Work @default.
- W147940244 sameAs 147940244 @default.
- W147940244 citedByCount "1" @default.
- W147940244 crossrefType "proceedings-article" @default.
- W147940244 hasAuthorship W147940244A5001506048 @default.
- W147940244 hasAuthorship W147940244A5009882600 @default.
- W147940244 hasAuthorship W147940244A5038483503 @default.
- W147940244 hasAuthorship W147940244A5052630741 @default.
- W147940244 hasAuthorship W147940244A5085397681 @default.
- W147940244 hasConcept C100460472 @default.
- W147940244 hasConcept C120665830 @default.
- W147940244 hasConcept C121332964 @default.
- W147940244 hasConcept C1291036 @default.
- W147940244 hasConcept C130472188 @default.
- W147940244 hasConcept C145148216 @default.
- W147940244 hasConcept C161866238 @default.
- W147940244 hasConcept C168834538 @default.
- W147940244 hasConcept C171250308 @default.
- W147940244 hasConcept C178790620 @default.
- W147940244 hasConcept C185592680 @default.
- W147940244 hasConcept C192562407 @default.
- W147940244 hasConcept C199360897 @default.
- W147940244 hasConcept C200274948 @default.
- W147940244 hasConcept C204223013 @default.
- W147940244 hasConcept C2779227376 @default.
- W147940244 hasConcept C41008148 @default.
- W147940244 hasConcept C49040817 @default.
- W147940244 hasConcept C50774322 @default.
- W147940244 hasConcept C53524968 @default.
- W147940244 hasConcept C65682993 @default.
- W147940244 hasConceptScore W147940244C100460472 @default.
- W147940244 hasConceptScore W147940244C120665830 @default.
- W147940244 hasConceptScore W147940244C121332964 @default.
- W147940244 hasConceptScore W147940244C1291036 @default.
- W147940244 hasConceptScore W147940244C130472188 @default.
- W147940244 hasConceptScore W147940244C145148216 @default.
- W147940244 hasConceptScore W147940244C161866238 @default.
- W147940244 hasConceptScore W147940244C168834538 @default.
- W147940244 hasConceptScore W147940244C171250308 @default.
- W147940244 hasConceptScore W147940244C178790620 @default.
- W147940244 hasConceptScore W147940244C185592680 @default.
- W147940244 hasConceptScore W147940244C192562407 @default.
- W147940244 hasConceptScore W147940244C199360897 @default.
- W147940244 hasConceptScore W147940244C200274948 @default.
- W147940244 hasConceptScore W147940244C204223013 @default.
- W147940244 hasConceptScore W147940244C2779227376 @default.
- W147940244 hasConceptScore W147940244C41008148 @default.
- W147940244 hasConceptScore W147940244C49040817 @default.
- W147940244 hasConceptScore W147940244C50774322 @default.
- W147940244 hasConceptScore W147940244C53524968 @default.
- W147940244 hasConceptScore W147940244C65682993 @default.
- W147940244 hasLocation W1479402441 @default.
- W147940244 hasOpenAccess W147940244 @default.
- W147940244 hasPrimaryLocation W1479402441 @default.
- W147940244 hasRelatedWork W1994164260 @default.
- W147940244 hasRelatedWork W2005900394 @default.
- W147940244 hasRelatedWork W2011228020 @default.
- W147940244 hasRelatedWork W2023356181 @default.
- W147940244 hasRelatedWork W203465172 @default.
- W147940244 hasRelatedWork W2056198523 @default.
- W147940244 hasRelatedWork W2093141138 @default.
- W147940244 hasRelatedWork W2207183411 @default.
- W147940244 hasRelatedWork W2728583571 @default.
- W147940244 hasRelatedWork W3021341094 @default.
- W147940244 isParatext "false" @default.
- W147940244 isRetracted "false" @default.
- W147940244 magId "147940244" @default.
- W147940244 workType "article" @default.