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- W1480142737 abstract "Fully automated LSI fabrication technology has been developed using c-c fabrication equipments and wafer cassette transportation system. A fully automated LSI fabrication line can be constructed by extending the technologies established in the present work." @default.
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- W1480142737 date "1982-09-01" @default.
- W1480142737 modified "2023-10-17" @default.
- W1480142737 title "Fully Automated LSI Fabrication Technology Using Wafer Cassette Transportation System" @default.
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