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- W1480493321 abstract "The performance of layered Pr/sub 2/Ti/sub 2/O/sub 7//SiO/sub 2/ MIM capacitors for mixed-signal and RF device applications is presented for the first time. A capacitance density of 3.2 fF//spl mu/m/sup 2/ with a very low leakage parameter of 5 fA/pFV and quadratic voltage capacitance coefficient of -100 ppm/V/sup 2/ was achieved. The extrapolated operating voltage for 10 years lifetime is 3 V." @default.
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- W1480493321 date "2006-02-06" @default.
- W1480493321 modified "2023-10-18" @default.
- W1480493321 title "High quality layered Pr/sub 2/Ti/sub 2/O/sub 7//SiO/sub 2/ MIM capacitor for mixedsignal applications" @default.
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- W1480493321 doi "https://doi.org/10.1109/smic.2005.1587957" @default.
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