Matches in SemOpenAlex for { <https://semopenalex.org/work/W1480930837> ?p ?o ?g. }
Showing items 1 to 47 of
47
with 100 items per page.
- W1480930837 abstract "Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 2001." @default.
- W1480930837 created "2016-06-24" @default.
- W1480930837 creator A5013473698 @default.
- W1480930837 date "2001-01-01" @default.
- W1480930837 modified "2023-09-23" @default.
- W1480930837 title "Modeling and analysis of extrusion-spin coating : an efficient and deterministic photoresist coating method in microlithography" @default.
- W1480930837 hasPublicationYear "2001" @default.
- W1480930837 type Work @default.
- W1480930837 sameAs 1480930837 @default.
- W1480930837 citedByCount "0" @default.
- W1480930837 crossrefType "dissertation" @default.
- W1480930837 hasAuthorship W1480930837A5013473698 @default.
- W1480930837 hasConcept C115196108 @default.
- W1480930837 hasConcept C134406635 @default.
- W1480930837 hasConcept C159985019 @default.
- W1480930837 hasConcept C192562407 @default.
- W1480930837 hasConcept C2778958987 @default.
- W1480930837 hasConcept C2779227376 @default.
- W1480930837 hasConcept C2781448156 @default.
- W1480930837 hasConceptScore W1480930837C115196108 @default.
- W1480930837 hasConceptScore W1480930837C134406635 @default.
- W1480930837 hasConceptScore W1480930837C159985019 @default.
- W1480930837 hasConceptScore W1480930837C192562407 @default.
- W1480930837 hasConceptScore W1480930837C2778958987 @default.
- W1480930837 hasConceptScore W1480930837C2779227376 @default.
- W1480930837 hasConceptScore W1480930837C2781448156 @default.
- W1480930837 hasLocation W14809308371 @default.
- W1480930837 hasOpenAccess W1480930837 @default.
- W1480930837 hasPrimaryLocation W14809308371 @default.
- W1480930837 hasRelatedWork W1498268249 @default.
- W1480930837 hasRelatedWork W2355642611 @default.
- W1480930837 hasRelatedWork W2527003822 @default.
- W1480930837 hasRelatedWork W2891495063 @default.
- W1480930837 hasRelatedWork W2912027467 @default.
- W1480930837 hasRelatedWork W2971897094 @default.
- W1480930837 hasRelatedWork W2975947242 @default.
- W1480930837 hasRelatedWork W3084257709 @default.
- W1480930837 hasRelatedWork W3116218189 @default.
- W1480930837 hasRelatedWork W3134986056 @default.
- W1480930837 hasRelatedWork W3176098980 @default.
- W1480930837 hasRelatedWork W628091601 @default.
- W1480930837 hasRelatedWork W2210661964 @default.
- W1480930837 hasRelatedWork W2228472677 @default.
- W1480930837 isParatext "false" @default.
- W1480930837 isRetracted "false" @default.
- W1480930837 magId "1480930837" @default.
- W1480930837 workType "dissertation" @default.