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- W1481215694 abstract "The effect of electroplating parameters (filling current density and additive concentration) on the copper in Through-Silicon-Via, abbreviated to TSV-Cu, protrusion during annealing is analyzed. Also, the influence of electro deposition parameters, and the annealing process on the TSV-Cu protrusion during thermal cycling are studied. The result shows that, the distribution of the TSV-Cu protrusion values after annealing conforms to the normal distribution law, and the protrusions of TSVs filled by higher current density and higher additive concentration are lower. In addition, annealing decrease the extent of protrusion during subsequent ten cycles of thermal cycling, and the protrusion values are decreased by 0.52µm∼0.72µm. The results help to solve key TSV-related manufacturing yield and reliability challenge for 3D IC integration." @default.
- W1481215694 created "2016-06-24" @default.
- W1481215694 creator A5003948829 @default.
- W1481215694 creator A5030458072 @default.
- W1481215694 creator A5045228160 @default.
- W1481215694 creator A5046302727 @default.
- W1481215694 creator A5066358720 @default.
- W1481215694 date "2015-08-01" @default.
- W1481215694 modified "2023-09-22" @default.
- W1481215694 title "Effect of electroplating parameter on the TSV-Cu protrusion during annealing and thermal cycling" @default.
- W1481215694 cites W1998613736 @default.
- W1481215694 cites W2001206317 @default.
- W1481215694 cites W2030287613 @default.
- W1481215694 cites W2045102846 @default.
- W1481215694 cites W2057995646 @default.
- W1481215694 cites W2078145815 @default.
- W1481215694 cites W2078492284 @default.
- W1481215694 cites W2084918147 @default.
- W1481215694 cites W2088407355 @default.
- W1481215694 cites W2092381854 @default.
- W1481215694 cites W2141290807 @default.
- W1481215694 cites W2160043679 @default.
- W1481215694 cites W2747943650 @default.
- W1481215694 cites W2122444913 @default.
- W1481215694 doi "https://doi.org/10.1109/icept.2015.7236719" @default.
- W1481215694 hasPublicationYear "2015" @default.
- W1481215694 type Work @default.
- W1481215694 sameAs 1481215694 @default.
- W1481215694 citedByCount "0" @default.
- W1481215694 crossrefType "proceedings-article" @default.
- W1481215694 hasAuthorship W1481215694A5003948829 @default.
- W1481215694 hasAuthorship W1481215694A5030458072 @default.
- W1481215694 hasAuthorship W1481215694A5045228160 @default.
- W1481215694 hasAuthorship W1481215694A5046302727 @default.
- W1481215694 hasAuthorship W1481215694A5066358720 @default.
- W1481215694 hasConcept C121332964 @default.
- W1481215694 hasConcept C159985019 @default.
- W1481215694 hasConcept C166957645 @default.
- W1481215694 hasConcept C177564732 @default.
- W1481215694 hasConcept C191897082 @default.
- W1481215694 hasConcept C192562407 @default.
- W1481215694 hasConcept C204530211 @default.
- W1481215694 hasConcept C207740977 @default.
- W1481215694 hasConcept C2777855556 @default.
- W1481215694 hasConcept C2779227376 @default.
- W1481215694 hasConcept C45632049 @default.
- W1481215694 hasConcept C51807945 @default.
- W1481215694 hasConcept C541528975 @default.
- W1481215694 hasConcept C544778455 @default.
- W1481215694 hasConcept C544956773 @default.
- W1481215694 hasConcept C62520636 @default.
- W1481215694 hasConcept C95457728 @default.
- W1481215694 hasConcept C97355855 @default.
- W1481215694 hasConceptScore W1481215694C121332964 @default.
- W1481215694 hasConceptScore W1481215694C159985019 @default.
- W1481215694 hasConceptScore W1481215694C166957645 @default.
- W1481215694 hasConceptScore W1481215694C177564732 @default.
- W1481215694 hasConceptScore W1481215694C191897082 @default.
- W1481215694 hasConceptScore W1481215694C192562407 @default.
- W1481215694 hasConceptScore W1481215694C204530211 @default.
- W1481215694 hasConceptScore W1481215694C207740977 @default.
- W1481215694 hasConceptScore W1481215694C2777855556 @default.
- W1481215694 hasConceptScore W1481215694C2779227376 @default.
- W1481215694 hasConceptScore W1481215694C45632049 @default.
- W1481215694 hasConceptScore W1481215694C51807945 @default.
- W1481215694 hasConceptScore W1481215694C541528975 @default.
- W1481215694 hasConceptScore W1481215694C544778455 @default.
- W1481215694 hasConceptScore W1481215694C544956773 @default.
- W1481215694 hasConceptScore W1481215694C62520636 @default.
- W1481215694 hasConceptScore W1481215694C95457728 @default.
- W1481215694 hasConceptScore W1481215694C97355855 @default.
- W1481215694 hasLocation W14812156941 @default.
- W1481215694 hasOpenAccess W1481215694 @default.
- W1481215694 hasPrimaryLocation W14812156941 @default.
- W1481215694 hasRelatedWork W1978768622 @default.
- W1481215694 hasRelatedWork W1981329167 @default.
- W1481215694 hasRelatedWork W1999251430 @default.
- W1481215694 hasRelatedWork W2021258871 @default.
- W1481215694 hasRelatedWork W2040678980 @default.
- W1481215694 hasRelatedWork W2058014112 @default.
- W1481215694 hasRelatedWork W2092946288 @default.
- W1481215694 hasRelatedWork W2316139264 @default.
- W1481215694 hasRelatedWork W2407129418 @default.
- W1481215694 hasRelatedWork W2469528422 @default.
- W1481215694 hasRelatedWork W2508968083 @default.
- W1481215694 hasRelatedWork W2518436472 @default.
- W1481215694 hasRelatedWork W2556528087 @default.
- W1481215694 hasRelatedWork W2567709716 @default.
- W1481215694 hasRelatedWork W2901903239 @default.
- W1481215694 hasRelatedWork W2940547228 @default.
- W1481215694 hasRelatedWork W3011922590 @default.
- W1481215694 hasRelatedWork W3092657399 @default.
- W1481215694 hasRelatedWork W3209487589 @default.
- W1481215694 hasRelatedWork W2851577232 @default.
- W1481215694 isParatext "false" @default.
- W1481215694 isRetracted "false" @default.
- W1481215694 magId "1481215694" @default.
- W1481215694 workType "article" @default.