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- W14813265 abstract "Various imaging methods and techniques capable of reaching a nanometer spatial resolution are currentlyunder development. One of them is an extreme ultraviolet microscopy, based on the Fresnel zone plates. Inthis paper a compact, high-repetition, laser-plasma EUV source, with a gas puff target, capable of emittingquasi-monochromatic radiation at 13.8 nm wavelength was used in the first demonstration of a desk-top EUVtransmissionmicroscopywithaspatial(half-pitch)resolutionof50nm. EUVmicroscopyimagesofobjectswithvariousthicknessesandthespatialresolutionmeasurementsusingtheknife-edgetestarepresented.PACS:52.38.Ph,52.50.Dg,41.50.+h,42.30.Va,42.79.Ci" @default.
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- W14813265 date "2012-02-01" @default.
- W14813265 modified "2023-09-27" @default.
- W14813265 title "Nanometer-Scale Incoherent Imaging Using Laser-Plasma EUV Source" @default.
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- W14813265 doi "https://doi.org/10.12693/aphyspola.121.450" @default.
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