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• W1482353653 endingPage "F176" @default.
• W1482353653 startingPage "F176" @default.
• W1482353653 abstract "Capacitance-voltage characteristics of gate stacks with composition and were analyzed. The characteristics revealed a high density of negative fixed charges in the oxide film. We have observed that the value of the Ru work function remained constant after forming gas annealing at temperatures between 430 and , respectively, while fixed charges were reduced at temperatures above . We speculated that the decrease of negative fixed charges can be explained by the generation of positively charged centers in the oxide layer. The positively charged centers can account for a compensation of the negative fixed oxide charge. Rapid thermal annealing at temperatures up to in nitrogen did not influence the fixed oxide charges in the films." @default.
• W1482353653 created "2016-06-24" @default.
• W1482353653 creator A5000487880 @default.
• W1482353653 creator A5002895267 @default.
• W1482353653 creator A5006447144 @default.
• W1482353653 creator A5049911473 @default.
• W1482353653 creator A5053016700 @default.
• W1482353653 creator A5057127285 @default.
• W1482353653 creator A5068903972 @default.
• W1482353653 creator A5071857275 @default.
• W1482353653 creator A5072968398 @default.
• W1482353653 date "2006-01-01" @default.
• W1482353653 modified "2023-10-14" @default.
• W1482353653 title "Properties of Ru∕Hf[sub x]Si[sub 1−x]O[sub y]∕Si Metal Oxide Semiconductor Gate Stack Structures Grown by Atomic Vapor Deposition" @default.
• W1482353653 cites W1977727537 @default.
• W1482353653 cites W1991965248 @default.
• W1482353653 cites W1994911721 @default.
• W1482353653 cites W1998719028 @default.
• W1482353653 cites W2016162937 @default.
• W1482353653 cites W2038096134 @default.
• W1482353653 cites W2062268908 @default.
• W1482353653 doi "https://doi.org/10.1149/1.2209560" @default.
• W1482353653 hasPublicationYear "2006" @default.
• W1482353653 type Work @default.
• W1482353653 sameAs 1482353653 @default.
• W1482353653 citedByCount "2" @default.
• W1482353653 crossrefType "journal-article" @default.
• W1482353653 hasAuthorship W1482353653A5000487880 @default.
• W1482353653 hasAuthorship W1482353653A5002895267 @default.
• W1482353653 hasAuthorship W1482353653A5006447144 @default.
• W1482353653 hasAuthorship W1482353653A5049911473 @default.
• W1482353653 hasAuthorship W1482353653A5053016700 @default.
• W1482353653 hasAuthorship W1482353653A5057127285 @default.
• W1482353653 hasAuthorship W1482353653A5068903972 @default.
• W1482353653 hasAuthorship W1482353653A5071857275 @default.
• W1482353653 hasAuthorship W1482353653A5072968398 @default.
• W1482353653 hasConcept C113196181 @default.
• W1482353653 hasConcept C115235246 @default.
• W1482353653 hasConcept C119599485 @default.
• W1482353653 hasConcept C127413603 @default.
• W1482353653 hasConcept C159467904 @default.
• W1482353653 hasConcept C165801399 @default.
• W1482353653 hasConcept C172385210 @default.
• W1482353653 hasConcept C178790620 @default.
• W1482353653 hasConcept C185592680 @default.
• W1482353653 hasConcept C191897082 @default.
• W1482353653 hasConcept C192562407 @default.
• W1482353653 hasConcept C199360897 @default.
• W1482353653 hasConcept C2361726 @default.
• W1482353653 hasConcept C2777855556 @default.
• W1482353653 hasConcept C2779851234 @default.
• W1482353653 hasConcept C2984553159 @default.
• W1482353653 hasConcept C36003996 @default.
• W1482353653 hasConcept C41008148 @default.
• W1482353653 hasConcept C43617362 @default.
• W1482353653 hasConcept C49040817 @default.
• W1482353653 hasConcept C52780932 @default.
• W1482353653 hasConcept C537208039 @default.
• W1482353653 hasConcept C544153396 @default.
• W1482353653 hasConcept C544956773 @default.
• W1482353653 hasConcept C57410435 @default.
• W1482353653 hasConcept C9395851 @default.
• W1482353653 hasConceptScore W1482353653C113196181 @default.
• W1482353653 hasConceptScore W1482353653C115235246 @default.
• W1482353653 hasConceptScore W1482353653C119599485 @default.
• W1482353653 hasConceptScore W1482353653C127413603 @default.
• W1482353653 hasConceptScore W1482353653C159467904 @default.
• W1482353653 hasConceptScore W1482353653C165801399 @default.
• W1482353653 hasConceptScore W1482353653C172385210 @default.
• W1482353653 hasConceptScore W1482353653C178790620 @default.
• W1482353653 hasConceptScore W1482353653C185592680 @default.
• W1482353653 hasConceptScore W1482353653C191897082 @default.
• W1482353653 hasConceptScore W1482353653C192562407 @default.
• W1482353653 hasConceptScore W1482353653C199360897 @default.
• W1482353653 hasConceptScore W1482353653C2361726 @default.
• W1482353653 hasConceptScore W1482353653C2777855556 @default.
• W1482353653 hasConceptScore W1482353653C2779851234 @default.
• W1482353653 hasConceptScore W1482353653C2984553159 @default.
• W1482353653 hasConceptScore W1482353653C36003996 @default.
• W1482353653 hasConceptScore W1482353653C41008148 @default.
• W1482353653 hasConceptScore W1482353653C43617362 @default.
• W1482353653 hasConceptScore W1482353653C49040817 @default.
• W1482353653 hasConceptScore W1482353653C52780932 @default.
• W1482353653 hasConceptScore W1482353653C537208039 @default.
• W1482353653 hasConceptScore W1482353653C544153396 @default.
• W1482353653 hasConceptScore W1482353653C544956773 @default.
• W1482353653 hasConceptScore W1482353653C57410435 @default.
• W1482353653 hasConceptScore W1482353653C9395851 @default.
• W1482353653 hasIssue "8" @default.
• W1482353653 hasLocation W14823536531 @default.
• W1482353653 hasOpenAccess W1482353653 @default.
• W1482353653 hasPrimaryLocation W14823536531 @default.
• W1482353653 hasRelatedWork W1482353653 @default.
• W1482353653 hasRelatedWork W1653731432 @default.
• W1482353653 hasRelatedWork W1978878594 @default.
• W1482353653 hasRelatedWork W1984109273 @default.
• W1482353653 hasRelatedWork W2039036835 @default.
• W1482353653 hasRelatedWork W2079368545 @default.

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