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- W1483149076 abstract "The method to fabricate silicon-on-glass materials for the applications of integrated optics and photonics is proposed. Anodic boning and selective etching are employed. SOG-based rib waveguides and nano-films are then studied." @default.
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- W1483149076 date "2006-10-24" @default.
- W1483149076 modified "2023-10-16" @default.
- W1483149076 title "Fabrication of silicon-on-glass waveguides" @default.
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- W1483149076 doi "https://doi.org/10.1109/group4.2005.1516405" @default.
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