Matches in SemOpenAlex for { <https://semopenalex.org/work/W1484228198> ?p ?o ?g. }
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- W1484228198 endingPage "34" @default.
- W1484228198 startingPage "33" @default.
- W1484228198 abstract "Polysilicon emitter contacts play an increasingly important role in high-speed npn bipolar transistors, particularly for emitter thicknesses of 0.1 μm or less. When optimizing these contacts, both the emitter resistance and the base current must be considered [1,2]. These two parameters are strongly dependent on the morphology of an interfacial layer between the poly and the single-crystal silicon. For high-speed applications, high polysilicon doping levels and moderate to high anneal temperatures are preferred in order to reduce the emitter resistance by partially breaking up the interfacial oxide[1, 2]. The integrity of the interfacial oxide and the extent of partial epitaxial alignment of the polysilicon are very sensitive to the process, leading to large variations in base current and emitter resistance from run to run[l]. This paper discusses a characterization of two methods of reducing this process sensitivity: rapid thermal annealing (RTA) to induce epitaxial alignment with the substrate, and replacement of the interfacial oxide by an extremely thin thermal nitride layer." @default.
- W1484228198 created "2016-06-24" @default.
- W1484228198 creator A5001288448 @default.
- W1484228198 creator A5018240386 @default.
- W1484228198 creator A5018615810 @default.
- W1484228198 creator A5040713914 @default.
- W1484228198 creator A5048144444 @default.
- W1484228198 date "1987-05-22" @default.
- W1484228198 modified "2023-09-24" @default.
- W1484228198 title "Reduced Process Sensitivity of Polysilicon Emitter Contacts for VLSI Bipolar Transistors" @default.
- W1484228198 hasPublicationYear "1987" @default.
- W1484228198 type Work @default.
- W1484228198 sameAs 1484228198 @default.
- W1484228198 citedByCount "2" @default.
- W1484228198 crossrefType "proceedings-article" @default.
- W1484228198 hasAuthorship W1484228198A5001288448 @default.
- W1484228198 hasAuthorship W1484228198A5018240386 @default.
- W1484228198 hasAuthorship W1484228198A5018615810 @default.
- W1484228198 hasAuthorship W1484228198A5040713914 @default.
- W1484228198 hasAuthorship W1484228198A5048144444 @default.
- W1484228198 hasConcept C110738630 @default.
- W1484228198 hasConcept C119599485 @default.
- W1484228198 hasConcept C127413603 @default.
- W1484228198 hasConcept C159985019 @default.
- W1484228198 hasConcept C165801399 @default.
- W1484228198 hasConcept C171250308 @default.
- W1484228198 hasConcept C172385210 @default.
- W1484228198 hasConcept C191897082 @default.
- W1484228198 hasConcept C192562407 @default.
- W1484228198 hasConcept C23061349 @default.
- W1484228198 hasConcept C2361726 @default.
- W1484228198 hasConcept C25356406 @default.
- W1484228198 hasConcept C2777855556 @default.
- W1484228198 hasConcept C2779227376 @default.
- W1484228198 hasConcept C2779851234 @default.
- W1484228198 hasConcept C46918542 @default.
- W1484228198 hasConcept C49040817 @default.
- W1484228198 hasConcept C544956773 @default.
- W1484228198 hasConcept C57863236 @default.
- W1484228198 hasConceptScore W1484228198C110738630 @default.
- W1484228198 hasConceptScore W1484228198C119599485 @default.
- W1484228198 hasConceptScore W1484228198C127413603 @default.
- W1484228198 hasConceptScore W1484228198C159985019 @default.
- W1484228198 hasConceptScore W1484228198C165801399 @default.
- W1484228198 hasConceptScore W1484228198C171250308 @default.
- W1484228198 hasConceptScore W1484228198C172385210 @default.
- W1484228198 hasConceptScore W1484228198C191897082 @default.
- W1484228198 hasConceptScore W1484228198C192562407 @default.
- W1484228198 hasConceptScore W1484228198C23061349 @default.
- W1484228198 hasConceptScore W1484228198C2361726 @default.
- W1484228198 hasConceptScore W1484228198C25356406 @default.
- W1484228198 hasConceptScore W1484228198C2777855556 @default.
- W1484228198 hasConceptScore W1484228198C2779227376 @default.
- W1484228198 hasConceptScore W1484228198C2779851234 @default.
- W1484228198 hasConceptScore W1484228198C46918542 @default.
- W1484228198 hasConceptScore W1484228198C49040817 @default.
- W1484228198 hasConceptScore W1484228198C544956773 @default.
- W1484228198 hasConceptScore W1484228198C57863236 @default.
- W1484228198 hasLocation W14842281981 @default.
- W1484228198 hasOpenAccess W1484228198 @default.
- W1484228198 hasPrimaryLocation W14842281981 @default.
- W1484228198 hasRelatedWork W1551377282 @default.
- W1484228198 hasRelatedWork W1577664933 @default.
- W1484228198 hasRelatedWork W1584897758 @default.
- W1484228198 hasRelatedWork W1907907963 @default.
- W1484228198 hasRelatedWork W1933362777 @default.
- W1484228198 hasRelatedWork W1964432886 @default.
- W1484228198 hasRelatedWork W2002224346 @default.
- W1484228198 hasRelatedWork W2002513852 @default.
- W1484228198 hasRelatedWork W2012623811 @default.
- W1484228198 hasRelatedWork W2077780040 @default.
- W1484228198 hasRelatedWork W2086857719 @default.
- W1484228198 hasRelatedWork W2086926186 @default.
- W1484228198 hasRelatedWork W2099421854 @default.
- W1484228198 hasRelatedWork W2100650557 @default.
- W1484228198 hasRelatedWork W2117230454 @default.
- W1484228198 hasRelatedWork W2131697441 @default.
- W1484228198 hasRelatedWork W2141449460 @default.
- W1484228198 hasRelatedWork W2536919057 @default.
- W1484228198 hasRelatedWork W2543508048 @default.
- W1484228198 hasRelatedWork W2031262045 @default.
- W1484228198 isParatext "false" @default.
- W1484228198 isRetracted "false" @default.
- W1484228198 magId "1484228198" @default.
- W1484228198 workType "article" @default.