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- W1484680098 abstract "thin films were deposited by reduced‐pressure CVD using aluminum tri‐isopropoxide as a source. The dependence of the growth rate on the substrate temperature and the source gas supply was determined. The activation energy of the decomposition reactions was determined to be 18 kcal/mol. The electrical resistivity and the dielectric properties are characterized. The origin of the frequency dispersion in the sample prepared under the surface reaction limited conditions are discussed." @default.
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- W1484680098 date "1985-04-01" @default.
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- W1484680098 title "Chemical Vapor Deposition of Al2 O 3 Thin Films under Reduced Pressures" @default.
- W1484680098 doi "https://doi.org/10.1149/1.2113979" @default.
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