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- W1485752608 abstract "Optical emission (OE) actinometry has been used to measure the absolute densities of Cl2, Cl, Cl+, and Ar+ in a high-density inductively coupled (ICP) Cl2–Ar plasma at 18 mTorr as a function of the 13.56 MHz radio frequency (rf) power and Ar fraction. The fractional dissociation of Cl2 to Cl increases with rf power, with the dissociated fraction increasing from 78% to 96% at 600 W (10.6 W cm−2) as the Ar fraction increases from 1% to 78% due to an increase in electron temperature. Emission from Cl+* and Ar+* originates primarily from electron excitation of Cl+ and Ar+ (and not excitation of Cl and Ar), making actinometric determination of Cl+ and Ar+ densities feasible. For powers exceeding 600 W, the neutral (Cl2 and Cl) to ion (Cl+ and Ar+) flux ratio is found to be strongly dependent on Ar fraction, decreasing by a factor of ∼3.0 as the latter is increased from 13% to 78%. This dependence can be attributed mostly to the decrease in Cl density and relatively little to the small decrease in the total positive ion density from 1.8×1011 to 1.4×1011 cm−3, over the same range. OE spectroscopy is also used to estimate the rate constant for the dissociative excitation of Cl2 to the Cl (4p2D0J′=3/2,5/2) excited state with emission at 822.2 nm, yielding ∼10−13 cm3 s−1." @default.
- W1485752608 created "2016-06-24" @default.
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- W1485752608 date "2001-10-01" @default.
- W1485752608 modified "2023-09-23" @default.
- W1485752608 title "Optical actinometry of Cl2, Cl, Cl+, and Ar+ densities in inductively coupled Cl2–Ar plasmas" @default.
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- W1485752608 doi "https://doi.org/10.1063/1.1391222" @default.
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