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- W148636269 abstract "We have examined the types of crystal structure in polycrystalline Si films and the conditions for the formation of each. The films were made by chemical deposition from the vapor. We examined undoped specimens and ones doped with P and As by ion implantation, thermal diffusion, or codeposition. Some of the specimens were annealed in N/sub 2/ at 1170-1470 K. The microstructures were examined by electron diffraction and transmission electron microscopy. Electron microscopy revealed three main structure types: fibrous, dendritic, and equiaxial." @default.
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- W148636269 date "1988-07-01" @default.
- W148636269 modified "2023-09-23" @default.
- W148636269 title "Structure types in polycrystalline silicon films" @default.
- W148636269 hasPublicationYear "1988" @default.
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