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- W1486654920 abstract "Recently, a new procedure was developed for the nitridation of high purity silicon via microwave heating. Silicon samples were processed to various stages of nitridation utilizing microwave heating and then analyzed by x-ray diffraction and by scanning electron microscopy. These data were compared to that obtained from samples nitrided by conventional heating methods. 9 refs., 6 figs., 1 tab." @default.
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- W1486654920 date "1991-01-01" @default.
- W1486654920 modified "2023-09-27" @default.
- W1486654920 title "Characterization of silicon nitride synthesized by microwave heating" @default.
- W1486654920 hasPublicationYear "1991" @default.
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