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- W1488088865 abstract "In this research, the wafer level Cu/BCB hybrid bonding with TSV for 3D integration by using fly cutting technology is proposed. As we know Cu bump surface is rough by electroplating, and BCB is spin-coated on Cu bump wafer induced high topography. Cu bump surface roughness and Cu/BCB co-planarization are improved by fly cutting to achieve good Cu to Cu and BCB to BCB bonding interface without any large bonding voids at 250°C for 30min, and the result of the bonding strength is evaluated by shear test. TSV fabrication, micro-bumping, hybrid bonding, wafer thinning and backside RDL formation are well developed and integrated to perform the 3D integration platform. Cu/BCB hybrid bonding with TSV for 3D integration is successfully developed and demonstrated in this paper." @default.
- W1488088865 created "2016-06-24" @default.
- W1488088865 creator A5010214129 @default.
- W1488088865 creator A5012284337 @default.
- W1488088865 creator A5022577507 @default.
- W1488088865 creator A5025518198 @default.
- W1488088865 creator A5049176761 @default.
- W1488088865 creator A5049812561 @default.
- W1488088865 creator A5052421409 @default.
- W1488088865 creator A5086825276 @default.
- W1488088865 date "2015-04-01" @default.
- W1488088865 modified "2023-09-29" @default.
- W1488088865 title "Cu/BCB hybrid bonding with TSV for 3D integration by using fly cutting technology" @default.
- W1488088865 cites W2017316695 @default.
- W1488088865 cites W2029204379 @default.
- W1488088865 cites W2080262451 @default.
- W1488088865 cites W2094909101 @default.
- W1488088865 cites W2106514741 @default.
- W1488088865 cites W2112512494 @default.
- W1488088865 cites W2116358629 @default.
- W1488088865 cites W2158807997 @default.
- W1488088865 cites W2541174062 @default.
- W1488088865 doi "https://doi.org/10.1109/icep-iaac.2015.7111128" @default.
- W1488088865 hasPublicationYear "2015" @default.
- W1488088865 type Work @default.
- W1488088865 sameAs 1488088865 @default.
- W1488088865 citedByCount "15" @default.
- W1488088865 countsByYear W14880888652017 @default.
- W1488088865 countsByYear W14880888652018 @default.
- W1488088865 countsByYear W14880888652019 @default.
- W1488088865 countsByYear W14880888652020 @default.
- W1488088865 countsByYear W14880888652021 @default.
- W1488088865 countsByYear W14880888652022 @default.
- W1488088865 countsByYear W14880888652023 @default.
- W1488088865 crossrefType "proceedings-article" @default.
- W1488088865 hasAuthorship W1488088865A5010214129 @default.
- W1488088865 hasAuthorship W1488088865A5012284337 @default.
- W1488088865 hasAuthorship W1488088865A5022577507 @default.
- W1488088865 hasAuthorship W1488088865A5025518198 @default.
- W1488088865 hasAuthorship W1488088865A5049176761 @default.
- W1488088865 hasAuthorship W1488088865A5049812561 @default.
- W1488088865 hasAuthorship W1488088865A5052421409 @default.
- W1488088865 hasAuthorship W1488088865A5086825276 @default.
- W1488088865 hasConcept C107365816 @default.
- W1488088865 hasConcept C127413603 @default.
- W1488088865 hasConcept C136525101 @default.
- W1488088865 hasConcept C138113353 @default.
- W1488088865 hasConcept C142724271 @default.
- W1488088865 hasConcept C159985019 @default.
- W1488088865 hasConcept C160671074 @default.
- W1488088865 hasConcept C180088628 @default.
- W1488088865 hasConcept C192562407 @default.
- W1488088865 hasConcept C204787440 @default.
- W1488088865 hasConcept C2776512755 @default.
- W1488088865 hasConcept C2779133538 @default.
- W1488088865 hasConcept C2779227376 @default.
- W1488088865 hasConcept C45632049 @default.
- W1488088865 hasConcept C49040817 @default.
- W1488088865 hasConcept C51807945 @default.
- W1488088865 hasConcept C71924100 @default.
- W1488088865 hasConcept C78519656 @default.
- W1488088865 hasConceptScore W1488088865C107365816 @default.
- W1488088865 hasConceptScore W1488088865C127413603 @default.
- W1488088865 hasConceptScore W1488088865C136525101 @default.
- W1488088865 hasConceptScore W1488088865C138113353 @default.
- W1488088865 hasConceptScore W1488088865C142724271 @default.
- W1488088865 hasConceptScore W1488088865C159985019 @default.
- W1488088865 hasConceptScore W1488088865C160671074 @default.
- W1488088865 hasConceptScore W1488088865C180088628 @default.
- W1488088865 hasConceptScore W1488088865C192562407 @default.
- W1488088865 hasConceptScore W1488088865C204787440 @default.
- W1488088865 hasConceptScore W1488088865C2776512755 @default.
- W1488088865 hasConceptScore W1488088865C2779133538 @default.
- W1488088865 hasConceptScore W1488088865C2779227376 @default.
- W1488088865 hasConceptScore W1488088865C45632049 @default.
- W1488088865 hasConceptScore W1488088865C49040817 @default.
- W1488088865 hasConceptScore W1488088865C51807945 @default.
- W1488088865 hasConceptScore W1488088865C71924100 @default.
- W1488088865 hasConceptScore W1488088865C78519656 @default.
- W1488088865 hasLocation W14880888651 @default.
- W1488088865 hasOpenAccess W1488088865 @default.
- W1488088865 hasPrimaryLocation W14880888651 @default.
- W1488088865 hasRelatedWork W1983585136 @default.
- W1488088865 hasRelatedWork W2026801433 @default.
- W1488088865 hasRelatedWork W2165547088 @default.
- W1488088865 hasRelatedWork W2227107447 @default.
- W1488088865 hasRelatedWork W2356978086 @default.
- W1488088865 hasRelatedWork W2366216218 @default.
- W1488088865 hasRelatedWork W2384183777 @default.
- W1488088865 hasRelatedWork W2793579499 @default.
- W1488088865 hasRelatedWork W2952005019 @default.
- W1488088865 hasRelatedWork W3176957722 @default.
- W1488088865 isParatext "false" @default.
- W1488088865 isRetracted "false" @default.
- W1488088865 magId "1488088865" @default.
- W1488088865 workType "article" @default.