Matches in SemOpenAlex for { <https://semopenalex.org/work/W1488409599> ?p ?o ?g. }
Showing items 1 to 60 of
60
with 100 items per page.
- W1488409599 abstract "Scanning illumination systems provide for a powerful and flexible means for controlling illumination coherence properties. Here we present a synchrotron‐based scanning‐mirror Fourier synthesis illuminator that enables sources with intrinsically high spatial coherence, such as undulators, to be used in situations demanding less coherence. The application considered here involves microfield extreme ultraviolet (EUV) lithography, however, the same methods are applicable to conventional microscopy as well as coherence‐imaging techniques. This flexible illuminator allows the coherence to be tuned in situ enabling the illumination to be tailored to the specific pattern being imaged. The effectiveness of the system is demonstrated through a variety of lithographic print experiments. These include the use of resolution enhancing coherence functions, which enable the printing of 50‐nm line‐space features using a lithographic optic with a NA of 0.1 and an operational wavelength of 13.4 nm." @default.
- W1488409599 created "2016-06-24" @default.
- W1488409599 creator A5003343236 @default.
- W1488409599 date "2004-01-01" @default.
- W1488409599 modified "2023-09-26" @default.
- W1488409599 title "A Synchrotron-Based Fourier-Synthesis Custom-Coherence Illuminator" @default.
- W1488409599 cites W1658472922 @default.
- W1488409599 cites W2063443041 @default.
- W1488409599 cites W2079246402 @default.
- W1488409599 cites W2798368384 @default.
- W1488409599 doi "https://doi.org/10.1063/1.1757915" @default.
- W1488409599 hasPublicationYear "2004" @default.
- W1488409599 type Work @default.
- W1488409599 sameAs 1488409599 @default.
- W1488409599 citedByCount "1" @default.
- W1488409599 crossrefType "proceedings-article" @default.
- W1488409599 hasAuthorship W1488409599A5003343236 @default.
- W1488409599 hasConcept C102519508 @default.
- W1488409599 hasConcept C120665830 @default.
- W1488409599 hasConcept C121332964 @default.
- W1488409599 hasConcept C146024833 @default.
- W1488409599 hasConcept C162996421 @default.
- W1488409599 hasConcept C192562407 @default.
- W1488409599 hasConcept C204223013 @default.
- W1488409599 hasConcept C21368211 @default.
- W1488409599 hasConcept C2781181686 @default.
- W1488409599 hasConcept C41008148 @default.
- W1488409599 hasConcept C49040817 @default.
- W1488409599 hasConcept C520434653 @default.
- W1488409599 hasConcept C62520636 @default.
- W1488409599 hasConceptScore W1488409599C102519508 @default.
- W1488409599 hasConceptScore W1488409599C120665830 @default.
- W1488409599 hasConceptScore W1488409599C121332964 @default.
- W1488409599 hasConceptScore W1488409599C146024833 @default.
- W1488409599 hasConceptScore W1488409599C162996421 @default.
- W1488409599 hasConceptScore W1488409599C192562407 @default.
- W1488409599 hasConceptScore W1488409599C204223013 @default.
- W1488409599 hasConceptScore W1488409599C21368211 @default.
- W1488409599 hasConceptScore W1488409599C2781181686 @default.
- W1488409599 hasConceptScore W1488409599C41008148 @default.
- W1488409599 hasConceptScore W1488409599C49040817 @default.
- W1488409599 hasConceptScore W1488409599C520434653 @default.
- W1488409599 hasConceptScore W1488409599C62520636 @default.
- W1488409599 hasLocation W14884095991 @default.
- W1488409599 hasOpenAccess W1488409599 @default.
- W1488409599 hasPrimaryLocation W14884095991 @default.
- W1488409599 hasRelatedWork W1488409599 @default.
- W1488409599 hasRelatedWork W1974236738 @default.
- W1488409599 hasRelatedWork W1990897501 @default.
- W1488409599 hasRelatedWork W1996907800 @default.
- W1488409599 hasRelatedWork W2022331525 @default.
- W1488409599 hasRelatedWork W2107876452 @default.
- W1488409599 hasRelatedWork W2739618422 @default.
- W1488409599 hasRelatedWork W2912652396 @default.
- W1488409599 hasRelatedWork W3053914760 @default.
- W1488409599 hasRelatedWork W3122703849 @default.
- W1488409599 isParatext "false" @default.
- W1488409599 isRetracted "false" @default.
- W1488409599 magId "1488409599" @default.
- W1488409599 workType "article" @default.